Device and Process Technologies for MEMS, Microelectronics, and Photonics III
Title | Device and Process Technologies for MEMS, Microelectronics, and Photonics III PDF eBook |
Author | Jung-Chih Chiao |
Publisher | SPIE-International Society for Optical Engineering |
Pages | 0 |
Release | 2004 |
Genre | Art |
ISBN | 9780819451699 |
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Device and Process Technologies for MEMS and Microelectronics
Title | Device and Process Technologies for MEMS and Microelectronics PDF eBook |
Author | |
Publisher | |
Pages | 574 |
Release | 2005 |
Genre | Microelectromechanical systems |
ISBN |
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
Title | Device and Process Technologies for Microelectronics, MEMS, and Photonics IV PDF eBook |
Author | |
Publisher | |
Pages | |
Release | 2005 |
Genre | |
ISBN |
Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
Title | Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV PDF eBook |
Author | Hark Hoe Tan |
Publisher | Society of Photo Optical |
Pages | 478 |
Release | 2008 |
Genre | Technology & Engineering |
ISBN | 9780819469717 |
Includes Proceedings Vol. 7821
Photonic MEMS Devices
Title | Photonic MEMS Devices PDF eBook |
Author | Ai-Qun Liu |
Publisher | CRC Press |
Pages | 502 |
Release | 2018-10-08 |
Genre | Technology & Engineering |
ISBN | 1420045717 |
Photonic MEMS devices represent the next major breakthrough in the silicon revolution. While many quality resources exist on the optic and photonic aspect of device physics, today’s researchers are in need of a reference that goes beyond to include all aspects of engineering innovation. An extension on traditional design and analysis, Photonic MEMS Devices: Design, Fabrication, and Control describes a broad range of optical and photonic devices, from MEMS optical switches and bandgap crystal switches to optical variable attenuators (VOA) and injection locked tunable lasers. It deals rigorously with all these technologies at a fundamental level, systematically introducing critical nomenclature. Each chapter also provides analysis techniques, equations, and experimental results. The book focuses not only on traditional design analysis, but also provides extensive background on realistic simulation and fabrication processes. With a clear attention to experimental relevance, this book provides the fundamental knowledge needed to take the next-step in integrating photonic MEMS devices into commercial products and technology.
Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
Title | Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV PDF eBook |
Author | |
Publisher | |
Pages | |
Release | 2007 |
Genre | |
ISBN |
Microelectromechanical Systems
Title | Microelectromechanical Systems PDF eBook |
Author | National Research Council |
Publisher | National Academies Press |
Pages | 76 |
Release | 1998-01-01 |
Genre | Technology & Engineering |
ISBN | 0309059801 |
Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.