Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.

Future robots are expected to work closely and interact safely with real-world objects and humans alike. Sense of touch is important in this context, as it helps estimate properties such as shape, texture, hardness, material type and many more; provides action related information, such as slip detection; and helps carrying out actions such as rolling an object between fingers without dropping it. This book presents an in-depth description of the solutions available for gathering tactile data, obtaining aforementioned tactile information from the data and effectively using the same in various robotic tasks. The efforts during last four decades or so have yielded a wide spectrum of tactile sensing technologies and engineered solutions for both intrinsic and extrinsic touch sensors. Nowadays, new materials and structures are being explored for obtaining robotic skin with physical features like bendable, conformable, and stretchable. Such features are important for covering various body parts of robots or 3D surfaces. Nonetheless, there exist many more hardware, software and application related issues that must be considered to make tactile sensing an effective component of future robotic platforms. This book presents an in-depth analysis of various system related issues and presents the trade-offs one may face while developing an effective tactile sensing system. For this purpose, human touch sensing has also been explored. The design hints coming out of the investigations into human sense of touch can be useful in improving the effectiveness of tactile sensory modality in robotics and other machines. Better integration of tactile sensors on a robot’s body is prerequisite for the effective utilization of tactile data. The concept of semiconductor devices based sensors is an interesting one, as it allows compact and fast tactile sensing systems with capabilities such as human-like spatio-temporal resolution. This book presents a comprehensive description of semiconductor devices based tactile sensing. In particular, novel Piezo Oxide Semiconductor Field Effect Transistor (POSFET) based approach for high resolution tactile sensing has been discussed in detail. Finally, the extension of semiconductors devices based sensors concept to large and flexile areas has been discussed for obtaining robotic or electronic skin. With its multidisciplinary scope, this book is suitable for graduate students and researchers coming from diverse areas such robotics (bio-robots, humanoids, rehabilitation etc.), applied materials, humans touch sensing, electronics, microsystems, and instrumentation. To better explain the concepts the text is supported by large number of figures.

This book highlights recent findings in industrial, manufacturing and mechanical engineering, and provides an overview of the state of the art in these fields, mainly in Russia and Eastern Europe. A broad range of topics and issues in modern engineering are discussed, including the dynamics of machines and working processes, friction, wear and lubrication in machines, surface transport and technological machines, manufacturing engineering of industrial facilities, materials engineering, metallurgy, control systems and their industrial applications, industrial mechatronics, automation and robotics. The book gathers selected papers presented at the 5th International Conference on Industrial Engineering (ICIE), held in Sochi, Russia in March 2019. The authors are experts in various fields of engineering, and all papers have been carefully reviewed. Given its scope, the book will be of interest to a wide readership, including mechanical and production engineers, lecturers in engineering disciplines, and engineering graduates.

Decision Making in Manufacturing Environment Using Graph Theory and Fuzzy Multiple Attribute Decision Making Methods presents the concepts and details of applications of MADM methods. A range of methods are covered including Analytic Hierarchy Process (AHP), Technique for Order Preference by Similarity to Ideal Solution (TOPSIS), VIšekriterijumsko KOmpromisno Rangiranje (VIKOR), Data Envelopment Analysis (DEA), Preference Ranking METHod for Enrichment Evaluations (PROMETHEE), ELimination Et Choix Traduisant la Realité (ELECTRE), COmplex PRoportional ASsessment (COPRAS), Grey Relational Analysis (GRA), UTility Additive (UTA), and Ordered Weighted Averaging (OWA). The existing MADM methods are improved upon and three novel multiple attribute decision making methods for solving the decision making problems of the manufacturing environment are proposed. The concept of integrated weights is introduced in the proposed subjective and objective integrated weights (SOIW) method and the weighted Euclidean distance based approach (WEDBA) to consider both the decision maker’s subjective preferences as well as the distribution of the attributes data of the decision matrix. These methods, which use fuzzy logic to convert the qualitative attributes into the quantitative attributes, are supported by various real-world application examples. Also, computer codes for AHP, TOPSIS, DEA, PROMETHEE, ELECTRE, COPRAS, and SOIW methods are included. This comprehensive coverage makes Decision Making in Manufacturing Environment Using Graph Theory and Fuzzy Multiple Attribute Decision Making Methods a key reference for the designers, manufacturing engineers, practitioners, managers, institutes involved in both design and manufacturing related projects. It is also an ideal study resource for applied research workers, academicians, and students in mechanical and industrial engineering.