Coupled Dynamics of Thin Micro Electro Mechanical Systems
Title | Coupled Dynamics of Thin Micro Electro Mechanical Systems PDF eBook |
Author | Ranajay Ghosh |
Publisher | |
Pages | 0 |
Release | 2010 |
Genre | |
ISBN |
Microelectromechanical systems (MEMS) combine high levels sensitivity and multifunctionality with small size and low power consumption. The major prime mover for MEMS industry in the past has been automobiles whereas consumer electronics (E.g. iPhones and Nintendo Wii) is the most important sector for growth now. With new focus on small scale energy harvesting from ambient vibration and air flow, MEMS have definitely entered a new generation. A significant factor propelling design and manufacturing is the need for reliable and robust computational tools. The basic skeleton of MEMS still remain suspended or anchored beams and plates actuated by electrical, electrostatic, thermal, magnetic or photonic mechanisms. This dissertation describes the simulation of coupled dynamics of thin MEMS actuated electrostatically and vibrating in a fluid medium. Although, only micro-beams are addressed here, the computational structure developed here can be directly used to address other forms of actuation or medium. A fully Lagrangian approach is developed to couple the electrostatic, fluidic and mechanical problem which is then solved using Newton's method. This approach eliminates the problems arising from remeshing and computing of derivatives of integrals over changing domain shapes. The mechanical problem is solved using finite element method (FEM) whereas the fluidic and electrostatic problems are tackled using the boundary element method (BEM). Severe numerical issues arise when dealing with very thin microstruc- tures (very high aspect ratio) for the BEM problem due to nearly singular integrals. A special BEM which addresses these problems has been developed for both the electrostatic and the fluidic problem. A singularity of mathematical nature arises at the free edge for the electrostatic BEM problem when dealing with cantilevers. This problem is solved by incorporating a singular element formulation for the electrostatic BEM. The resulting solution is compared with the case of simple extrapolation for some typical performance parameters. Finally, several possible extensions of current work like adapting the algorithm for nanoelectromechanical systems (NEMS), computational acceleration using the fast multipole method (FMM) and quantifying uncertainty has been explained in the concluding chapter.
Dynamics of Microelectromechanical Systems
Title | Dynamics of Microelectromechanical Systems PDF eBook |
Author | Nicolae Lobontiu |
Publisher | Springer Science & Business Media |
Pages | 411 |
Release | 2014-07-08 |
Genre | Technology & Engineering |
ISBN | 0387681957 |
Here is a textbook for senior undergraduate and graduate level students that offers a novel and systematic look into the dynamics of MEMS. It includes numerous solved examples together with the proposed problems. The material to be found here will also be of interest to researchers with a non-mechanical background. The book focuses on the mechanical domain, specifically the dynamic sub-domain, and provides an in-depth treatment of problems that involve reliable modeling, analysis and design.
Analysis of Thin Micro-electro-mechanical Systems
Title | Analysis of Thin Micro-electro-mechanical Systems PDF eBook |
Author | Srinivas Telukunta |
Publisher | |
Pages | 278 |
Release | 2006 |
Genre | |
ISBN |
Microsystems Dynamics
Title | Microsystems Dynamics PDF eBook |
Author | Vytautas Ostasevicius |
Publisher | Springer |
Pages | 214 |
Release | 2010-11-11 |
Genre | Technology & Engineering |
ISBN | 9789048197002 |
In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added benefits of lightweight, miniature size and low energy consumption make MEMS commercialization very attractive. Modeling and simulation is an indispensable tool in the process of studying these new dynamic phenomena, development of new microdevices and improvement of the existing designs. MEMS technology is inherently multidisciplinary since operation of microdevices involves interaction of several energy domains of different physical nature, for example, mechanical, fluidic and electric forces. Dynamic behavior of contact-type electrostatic microactuators, such as a microswitches, is determined by nonlinear fluidic-structural, electrostatic-structural and vibro-impact interactions. The latter is particularly important: Therefore it is crucial to develop accurate computational models for numerical analysis of the aforementioned interactions in order to better understand coupled-field effects, study important system dynamic characteristics and thereby formulate guidelines for the development of more reliable microdevices with enhanced performance, reliability and functionality.
An Algorithm for Simulation of Coupled-electro-mechanical Field Effects in Microelectromechanical Systems
Title | An Algorithm for Simulation of Coupled-electro-mechanical Field Effects in Microelectromechanical Systems PDF eBook |
Author | Giancarlo Marseglia |
Publisher | |
Pages | 318 |
Release | 2003 |
Genre | |
ISBN |
Mechanics of Microelectromechanical Systems
Title | Mechanics of Microelectromechanical Systems PDF eBook |
Author | Nicolae Lobontiu |
Publisher | Springer Science & Business Media |
Pages | 415 |
Release | 2006-01-16 |
Genre | Technology & Engineering |
ISBN | 0387230378 |
This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies. Lumped-parameter stiffness and compliance properties of flexible components are derived both analytically (as closed-form solutions) and as simplified (engineering) formulas. Also studied are the principal means of actuation/sensing and their integration into the overall microsystem. Various examples of MEMS are studied in order to better illustrate the presentation of the different modeling principles and algorithms. Through its objective, approach and scope, this book offers a novel and systematic insight into the MEMS domain and complements existing work in the literature addressing part of the material developed herein.
Mechanics of Microsystems
Title | Mechanics of Microsystems PDF eBook |
Author | Alberto Corigliano |
Publisher | John Wiley & Sons |
Pages | 332 |
Release | 2018-04-02 |
Genre | Technology & Engineering |
ISBN | 1119053838 |
Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.