An understanding of the collisions between micro particles is of great importance for the number of fields belonging to physics, chemistry, astrophysics, biophysics etc. The present book, a theory for electron-atom and molecule collisions is developed using non-relativistic quantum mechanics in a systematic and lucid manner. The scattering theory is an essential part of the quantum mechanics course of all universities. During the last 30 years, the author has lectured on the topics presented in this book (collisions physics, photon-atom collisions, electron-atom and electron-molecule collisions, "electron-photon delayed coincidence technique", etc.) at many institutions including Wayne State University, Detroit, MI, The University of Western Ontario, Canada, and The Meerut University, India. The present book is the outcome of those lectures and is written to serve as a textbook for post-graduate and pre-PhD students and as a reference book for researchers.

This book is a short outline of the present state of the theory of electron collisions with atomic particles - atoms, molecules and ions. It is addressed to those who by nature of their work need detailed information about the cross sections of various processes of electron collisions with atomic particles: experimentalists working in plasma physics, optics, quantum electronics, atmospheric and space physics, 'etc. Some of the cross sections have been measured. But in many important cases the only source of information is theoretical calcu lation. The numerous theoretical papers dealing with electronic collision processes contain various approximations. The inter relation between them and the level of their accuracy is often diffi cult to understand without a systematic study of the theory of atomic collisions, not to mention that theoretical considerations are necessary for the consistent interpretation of experimental results. The main constituents of the book are: 1. General theory with special emphasis on the topics most impor tant for understanding and discussing electron collisions with atomic particles.

Scattering phenomena play an important role in modern physics. Many significant discoveries have been made through collision experiments. Amongst diverse kinds of collision systems, this book sheds light on the collision of an electron with a molecule. The electron-molecule collision provides a basic scattering problem. It is scattering by a nonspherical, multicentered composite particle with its centers having degrees of freedom of motion. The molecule can even disintegrate, Le., dissociate or ionize into fragments, some or all of which may also be molecules. Although it is a difficult problem, the recent theoretical, experimental, and computational progress has been so significant as to warrant publication of a book that specializes in this field. The progress owes partly to technical develop ments in measurements and computations. No less important has been the great and continuing stimulus from such fields of application as astrophysics, the physics of the earth's upper atmosphere, laser physics, radiation physics, the physics of gas discharges, magnetohydrodynamic power generation, and so on. This book aims at introducing the reader to the problem of electron molecule collisions, elucidating the physics behind the phenomena, and review ing, to some extent, up-to-date important results. This book should be appropri ate for graduate reading in physics and chemistry. We also believe that investi gators in atomic and molecular physics will benefit much from this book.

Plasmas comprise more than 99% of the observable universe. They are important in many technologies and are key potential sources for fusion power. Atomic and radiation physics is critical for the diagnosis, observation and simulation of astrophysical and laboratory plasmas, and plasma physicists working in a range of areas from astrophysics, magnetic fusion, and inertial fusion utilise atomic and radiation physics to interpret measurements. This text develops the physics of emission, absorption and interaction of light in astrophysics and in laboratory plasmas from first principles using the physics of various fields of study including quantum mechanics, electricity and magnetism, and statistical physics. Linking undergraduate level atomic and radiation physics with the advanced material required for postgraduate study and research, this text adopts a highly pedagogical approach and includes numerous exercises within each chapter for students to reinforce their understanding of the key concepts.

This volume reviews the theoretical and experimental work about continuous electron emission in energetic ion-atom collisions over the last 30 years. General properties of the two-center electron emission are analyzed, and particular attention is given to screening effects. The book also offers an overview of multiple ionization processes.

Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.

The papers collected in this volume have been presented during a workshop on "Electron-Atom and Molecule Collisions" held at the Centre for Interdisciplinary Studies of the University of Bielefeld in May 1980. This workshop, part of a larger program concerned with the "Properties and Reactions of Isolated Molecules and Atoms," focused on the theory and computational techniques for the quanti tative description of electron scattering phenomena. With the advances which have been made in the accurate quantum mechanical characterisation of bound states of atoms and molecules, the more complicated description of the unbound systems and resonances important in electron collision processes has matured too. As expli cated in detail in the articles of this volume, the theory for the quantitative explanation of elastic and inelastic electron molecule collisions, of photo- and multiple photon ionization and even for electron impact ionization is well developed in a form which lends itself to a complete quantitative ab initio interpretation and pre diction of the observable effects. Many of the experiences gained and the techniques which have evolved over the years in the com putational characterization of bound states have become an essential basis for this development. To be sure, much needs to be done before we have a complete and detailed theoretical understanding of the known collisional processes and of the phenomena and effects, which may still be un covered with the continuing refinement of the experimental tech niques.