Chemistry of Atomic Layer Deposition
Title | Chemistry of Atomic Layer Deposition PDF eBook |
Author | Seán Thomas Barry |
Publisher | Walter de Gruyter GmbH & Co KG |
Pages | 113 |
Release | 2021-11-08 |
Genre | Technology & Engineering |
ISBN | 3110712539 |
This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.
Chemistry of Atomic Layer Deposition
Title | Chemistry of Atomic Layer Deposition PDF eBook |
Author | Seán Thomas Barry |
Publisher | de Gruyter |
Pages | 233 |
Release | 2021-12-06 |
Genre | |
ISBN | 9783110712513 |
This book will help chemists and non-chemists alike understand the fundamentals of precursor design, and how these precursors drive the processes of atomic layer deposition. The underlying principle in atomic layer deposition relies on the chemistry of a precursor with a surface. But what makes a good precursor? How does a precursor's reaction at a surface allow it such phenomenal and exploitable characteristics? How do you design a precursor?
Atomic Layer Deposition of Nanostructured Materials
Title | Atomic Layer Deposition of Nanostructured Materials PDF eBook |
Author | Nicola Pinna |
Publisher | John Wiley & Sons |
Pages | 463 |
Release | 2012-09-19 |
Genre | Technology & Engineering |
ISBN | 3527639926 |
Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at displays with perfect structure and process controllability. Nowadays, creating nanomaterials and producing nanostructures with structural perfection is an important goal for many applications in nanotechnology. As ALD is one of the important techniques which offers good control over the surface structures created, it is more and more in the focus of scientists. The book is structured in such a way to fi t both the need of the expert reader (due to the systematic presentation of the results at the forefront of the technique and their applications) and the ones of students and newcomers to the fi eld (through the first part detailing the basic aspects of the technique). This book is a must-have for all Materials Scientists, Surface Chemists, Physicists, and Scientists in the Semiconductor Industry.
Atomic Layer Deposition for Semiconductors
Title | Atomic Layer Deposition for Semiconductors PDF eBook |
Author | Cheol Seong Hwang |
Publisher | Springer Science & Business Media |
Pages | 266 |
Release | 2013-10-18 |
Genre | Science |
ISBN | 146148054X |
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Organometallic Chemistry
Title | Organometallic Chemistry PDF eBook |
Author | Nathan J Patmore |
Publisher | Royal Society of Chemistry |
Pages | 210 |
Release | 2018-11-16 |
Genre | Science |
ISBN | 1788010671 |
With the increase in volume, velocity and variety of information, researchers can find it difficult to keep up to date with the literature in their field. Providing an invaluable resource, this volume contains analysed, evaluated and distilled information on the latest in organometallic chemistry research and emerging fields. The reviews range in scope and include π-coordinated arene metal complexes and catalysis by arene exchange, rylenes as chromophores in catalysts for CO2 photoreduction, metal nodes and metal sites in metal–organic frameworks, developments in molecular precursors for CVD and ALD, and multiphoton luminescence processes in f-element containing compounds.
Chemical Vapor Deposition for Nanotechnology
Title | Chemical Vapor Deposition for Nanotechnology PDF eBook |
Author | Pietro Mandracci |
Publisher | BoD – Books on Demand |
Pages | 166 |
Release | 2019-01-10 |
Genre | Technology & Engineering |
ISBN | 1789849608 |
Chemical vapor deposition (CVD) techniques have played a major role in the development of modern technology, and the rise of nanotechnology has further increased their importance, thanks to techniques such as atomic layer deposition (ALD) and vapor liquid solid growth, which are able to control the growth process at the nanoscale. This book aims to contribute to the knowledge of recent developments in CVD technology and its applications. To this aim, important process innovations, such as spatial ALD, direct liquid injection CVD, and electron cyclotron resonance CVD, are presented. Moreover, some of the most recent applications of CVD techniques for the growth of nanomaterials, including graphene, nanofibers, and diamond-like carbon, are described in the book.
Precursor Chemistry of Advanced Materials
Title | Precursor Chemistry of Advanced Materials PDF eBook |
Author | Roland A. Fischer |
Publisher | Springer Science & Business Media |
Pages | 240 |
Release | 2005-09-29 |
Genre | Science |
ISBN | 9783540016052 |
Material synthesis by the transformation of organometallic compounds (precursors) by vapor deposition techniques such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) has been in the forefront of modern day research and development of new materials. There exists a need for new routes for designing and synthesizing new precursors as well as the application of established molecular precursors to derive tuneable materials for technological demands. With regard to the precursor chemistry, a most detailed understanding of the mechanistic complexity of materials formation from molecular precursors is very important for further development of new processes and advanced materials. To emphasize and stimulate research in these areas, this volume comprises a selection of case studies covering various key-aspects of the interplay of precursor chemistry with the process conditions of materials formation, particularly looking at the similarities and differences of CVD, ALD and nanoparticle synthesis, e.g. colloid chemistry, involving tailored molecular precursors.