Chemical Vapor Deposition of Metal Oxide, Titanium Nitride and Niobium Nitride Thin Films
Title | Chemical Vapor Deposition of Metal Oxide, Titanium Nitride and Niobium Nitride Thin Films PDF eBook |
Author | Xinye Liu |
Publisher | |
Pages | 436 |
Release | 1999 |
Genre | Chemical vapor deposition |
ISBN |
Chemical Vapor Deposition and Atomic Layer Deposition of Metal Oxide and Nitride Thin Films
Title | Chemical Vapor Deposition and Atomic Layer Deposition of Metal Oxide and Nitride Thin Films PDF eBook |
Author | Jeffrey Thomas Barton |
Publisher | |
Pages | 276 |
Release | 2003 |
Genre | Chemical vapor deposition |
ISBN |
Chemical Vapor Deposition Studies of Titanium-silicon-nitride Thin Films for Use as Diffusion Barriers
Title | Chemical Vapor Deposition Studies of Titanium-silicon-nitride Thin Films for Use as Diffusion Barriers PDF eBook |
Author | Edward Thomas Norton (Jr.) |
Publisher | |
Pages | 66 |
Release | 1997 |
Genre | |
ISBN |
Handbook of Chemical Vapor Deposition
Title | Handbook of Chemical Vapor Deposition PDF eBook |
Author | Hugh O. Pierson |
Publisher | William Andrew |
Pages | 459 |
Release | 2012-12-02 |
Genre | Technology & Engineering |
ISBN | 1437744885 |
Handbook of Chemical Vapor Deposition: Principles, Technology and Applications provides information pertinent to the fundamental aspects of chemical vapor deposition. This book discusses the applications of chemical vapor deposition, which is a relatively flexible technology that can accommodate many variations. Organized into 12 chapters, this book begins with an overview of the theoretical examination of the chemical vapor deposition process. This text then describes the major chemical reactions and reviews the chemical vapor deposition systems and equipment used in research and production. Other chapters consider the materials deposited by chemical vapor deposition. This book discusses as well the potential applications of chemical vapor deposition in semiconductors and electronics. The final chapter deals with ion implantation as a major process in the fabrication of semiconductors. This book is a valuable resource for scientists, engineers, and students. Production and marketing managers and suppliers of equipment, materials, and services will also find this book useful.
Chemical Vapor Deposition and Characterization of Titanium Dioxide Thin Films
Title | Chemical Vapor Deposition and Characterization of Titanium Dioxide Thin Films PDF eBook |
Author | David Christopher Gilmer |
Publisher | |
Pages | 314 |
Release | 1998 |
Genre | |
ISBN |
I. Plasma Enhanced Chemical Vapor Deposition of Main Group Nitride Thin Films
Title | I. Plasma Enhanced Chemical Vapor Deposition of Main Group Nitride Thin Films PDF eBook |
Author | Sri Prikash Rangarajan |
Publisher | |
Pages | 330 |
Release | 1994 |
Genre | Amides |
ISBN |
Chemical Vapor Deposition (CVD) of Transition Metal and Metal Oxide Thin Films
Title | Chemical Vapor Deposition (CVD) of Transition Metal and Metal Oxide Thin Films PDF eBook |
Author | |
Publisher | |
Pages | |
Release | 1999 |
Genre | |
ISBN |