Chemical Vapor Deposition and Atomic Layer Deposition of Metal Oxide and Nitride Thin Films
Title | Chemical Vapor Deposition and Atomic Layer Deposition of Metal Oxide and Nitride Thin Films PDF eBook |
Author | Jeffrey Thomas Barton |
Publisher | |
Pages | 276 |
Release | 2003 |
Genre | Chemical vapor deposition |
ISBN |
Atomic Layer Deposition of Metal Oxide and Nitride Thin Films [microform]
Title | Atomic Layer Deposition of Metal Oxide and Nitride Thin Films [microform] PDF eBook |
Author | Becker, Jill Svenja |
Publisher | Ann Arbor, Mich. : University Microfilms International |
Pages | 308 |
Release | 2002 |
Genre | Thin film devices |
ISBN |
Atomic Layer Deposition
Title | Atomic Layer Deposition PDF eBook |
Author | Tommi Kääriäinen |
Publisher | John Wiley & Sons |
Pages | 274 |
Release | 2013-05-28 |
Genre | Technology & Engineering |
ISBN | 1118062779 |
Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.
Chemical Vapour Deposition
Title | Chemical Vapour Deposition PDF eBook |
Author | Anthony C. Jones |
Publisher | Royal Society of Chemistry |
Pages | 600 |
Release | 2009 |
Genre | Science |
ISBN | 0854044655 |
"The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspects of CVD processes. Basic concepts, such as the various types of CVD processes, the design of CVD reactors, reaction modelling and CVD precursor chemistry are covered in the first few"--Jacket
Atomic Layer Deposition of Nanostructured Materials
Title | Atomic Layer Deposition of Nanostructured Materials PDF eBook |
Author | Nicola Pinna |
Publisher | John Wiley & Sons |
Pages | 463 |
Release | 2012-09-19 |
Genre | Technology & Engineering |
ISBN | 3527639926 |
Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at displays with perfect structure and process controllability. Nowadays, creating nanomaterials and producing nanostructures with structural perfection is an important goal for many applications in nanotechnology. As ALD is one of the important techniques which offers good control over the surface structures created, it is more and more in the focus of scientists. The book is structured in such a way to fi t both the need of the expert reader (due to the systematic presentation of the results at the forefront of the technique and their applications) and the ones of students and newcomers to the fi eld (through the first part detailing the basic aspects of the technique). This book is a must-have for all Materials Scientists, Surface Chemists, Physicists, and Scientists in the Semiconductor Industry.
Chemical Vapor Deposition of Metal Oxide, Titanium Nitride and Niobium Nitride Thin Films
Title | Chemical Vapor Deposition of Metal Oxide, Titanium Nitride and Niobium Nitride Thin Films PDF eBook |
Author | Xinye Liu |
Publisher | |
Pages | 436 |
Release | 1999 |
Genre | Chemical vapor deposition |
ISBN |
Atomic Layer Deposition Applications 10
Title | Atomic Layer Deposition Applications 10 PDF eBook |
Author | F. Roozeboom |
Publisher | The Electrochemical Society |
Pages | 311 |
Release | 2014 |
Genre | Chemical vapor deposition |
ISBN | 1607685469 |