Chemical-Mechanical Polishing 2000 - Fundamentals and Materials Issues:
Title | Chemical-Mechanical Polishing 2000 - Fundamentals and Materials Issues: PDF eBook |
Author | Rajiv K. Singh |
Publisher | Cambridge University Press |
Pages | 176 |
Release | 2014-06-05 |
Genre | Technology & Engineering |
ISBN | 9781107413146 |
Chemical-mechanical polishing (CMP) is a critical technology in the planarization of multilevel metallization systems and shallow-trench isolation in semiconductor manufacturing. Other emerging applications for this technology include flat-panel displays, magnetic data storage and microelectromechanical systems. The rapid emergence of copper as the conducting material for integrated circuits has further pushed CMP technology to the forefront of semiconductor manufacturing. However, a basic understanding of the CMP process, which is necessary to enable further advances, is inadequate. This book, first published in 2001, provides an insight into the fundamental processes in CMP. Presentations from academia, government institutions and industry are featured. Topics include: CMP mechanisms; dielectric and metal CMP; process integration and manufacturability; and CMP consumables.
Chemical-Mechanical Polishing - Fundamentals and Challenges: Volume 566
Title | Chemical-Mechanical Polishing - Fundamentals and Challenges: Volume 566 PDF eBook |
Author | S. V. Babu |
Publisher | |
Pages | 304 |
Release | 2000-02-10 |
Genre | Technology & Engineering |
ISBN |
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Chemical-mechanical Polishing
Title | Chemical-mechanical Polishing PDF eBook |
Author | |
Publisher | |
Pages | 184 |
Release | 2000 |
Genre | Electrolytic polishing |
ISBN |
Solid Freeform and Additive Fabrication - 2000: Volume 625
Title | Solid Freeform and Additive Fabrication - 2000: Volume 625 PDF eBook |
Author | Stephen C. Danforth |
Publisher | Mrs Proceedings |
Pages | 240 |
Release | 2000-10-02 |
Genre | Computers |
ISBN |
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Polycrystalline Metal and Magnetic Thin Films 2000: Volume 615
Title | Polycrystalline Metal and Magnetic Thin Films 2000: Volume 615 PDF eBook |
Author | Bruce M. Clemens |
Publisher | |
Pages | 218 |
Release | 2001-04-09 |
Genre | Science |
ISBN |
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics
Title | Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics PDF eBook |
Author | |
Publisher | |
Pages | 624 |
Release | 2001 |
Genre | Dielectric films |
ISBN |
Solid-State Chemistry of Inorganic Materials III: Volume 658
Title | Solid-State Chemistry of Inorganic Materials III: Volume 658 PDF eBook |
Author | Margret J. Geselbracht |
Publisher | |
Pages | 556 |
Release | 2001-11-07 |
Genre | Science |
ISBN |
Solid-state chemistry is an interdisciplinary field, and these researchers share the common challenge of understanding, controlling, and predicting the structures and properties of solids at the atomic level. This book provides a forum for the presentation of recent advances in the solid-state chemistry of inorganic materials and the impact of these advances on the development of practical applications. Topics include: crystal chemistry of complex systems; dielectrics, crystal chemistry, glasses and electrical transport; transport properties/metal-insulator systems; magnetism and manganates; new materials - meso/nanoporous materials; micro/meso/ nanoporous materials - inorganic/organic hybrids; synthesis, new methods and new materials; solid-state ionics, battery materials, thermopower and optical materials; solid-state ionics, battery materials and energy storage; and thermopower, themal expansion and optical materials. A highlight is a section dedicated to Professor J.M. Honig in recognition of his many contributions to the discipline of solid-state chemistry and his stewardship of the Journal of Solid-State Chemistry.