This is a practical textbook written for use by engineers, scientists and technicians. It is not intended to be a rigorous scientific treatment of the subject material, as this would fill several volumes. Rather, it introduces the reader to the fundamentals of the subject material, and provides sufficient references for an in-depth study of the subject by the interested technologist. The author has a lifetime teaching credential in the California Community College System. Also, he has taught technical courses with the American Vacuum Society for about 35 years. Students attending many of these classes have backgrounds varying from high-school graduates to Ph.D.s in technical disciplines. This is an extremely difficult class profile to teach. This book still endeavors to reach this same audience. Basic algebra is required to master most of the material. But, the calculus is used in derivation of some of the equations. The author risks use of the first person I, instead of the author, and you instead of the reader. Both are thought to be in poor taste when writing for publication in the scientific community. However, I am writing this book for you because the subject is exciting, and I enjoy teaching you, perhaps, something new. The book is written more in the vein of a one-on-one discussion with you, rather than the author lecturing to the reader. There are anecdotes, and examples of some failures and successes I have had over the last forty-five years in vacuum related activities, I'll try not to understate either. Lastly, there are a few equations which if memorised will help you as a vacuum technician. There are less than a dozen equations and half that many rules of thumb to memorize, which will be drawn on time an again in designing, operating and trouble-shooting any vacuum system.

Capture Pumping Technology: An Introduction is a practical book for students, technicians, scientists and engineers involved in the field. The author has drawn upon his vast experience in vacuum-related technologies to provide an introduction to the fundamentals of the subject. The book is written in an easy-to-read style based on a one-to-one discussion, and offers a selection of common problems at the end of each chapter. With chapters on basic theory, sputter-ion pumping, titanium sublimation pumping, nonevaporable getters, and cryopumping, the book makes an excellent introductory text.

This is a practical textbook written for use by engineers, scientists and technicians. It is not intended to be a rigorous scientific treatment of the subject material, as this would fill several volumes. Rather, it introduces the reader to the fundamentals of the subject material, and provides sufficient references for an in-depth study of the subject by the interested technologist. The author has a lifetime teaching credential in the California Community College System. Also, he has taught technical courses with the American Vacuum Society for about 35 years. Students attending many of these classes have backgrounds varying from high-school graduates to Ph.D.s in technical disciplines. This is an extremely difficult class profile to teach. This book still endeavors to reach this same audience. Basic algebra is required to master most of the material. But, the calculus is used in derivation of some of the equations. The author risks use of the first person I, instead of the author, and you instead of the reader. Both are thought to be in poor taste when writing for publication in the scientific community. However, I am writing this book for you because the subject is exciting, and I enjoy teaching you, perhaps, something new. The book is written more in the vein of a one-on-one discussion with you, rather than the author lecturing to the reader. There are anecdotes, and examples of some failures and successes I have had over the last forty-five years in vacuum related activities, I'll try not to understate either. Lastly, there are a few equations which if memorised will help you as a vacuum technician. There are less than a dozen equations and half that many rules of thumb to memorize, which will be drawn on time an again in designing, operating and trouble-shooting any vacuum system.

This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.

Vacuum technology is widely used in many manufacturing and developmental processes and its applications grow in scope and sophistication. It is an inter-disciplinary subject, embracing aspects of mechanical, electrical and chemical engineering, chemistry, and materials science while having a broad foundation in physics. In spite of its technological importance, and perhaps because of its cross-disciplinary nature, substantial teaching and training is not widely available. Basic Vacuum Technology aims to give readers a firm foundation of fundamental knowledge about the subject and the ability to apply it. This book is an introductory text on how to use vacuum techniques. It provides a good grounding in the basic scientific principles and concepts that underlie the production and measurement of vacua. The authors describe how these are applied in representative low, medium, high, and ultra-high vacuum systems and explain the most important practical aspects of the operation of a large variety of pumps, components, and measuring instrumentation. The book introduces numerical methods for analysis and prediction of the behavior of vacuum systems in terms of the properties of their individual elements and enables readers to recognize and resolve problems with malfunctioning systems.

In this volume, the editor and contributors describe the use of molecular beam epitaxy (MBE) for a range of key materials systems that are of interest for both technological and fundamental reasons. Prior books on MBE have provided an introduction to the basic concepts and techniques of MBE and emphasize growth and characterization of GaAs-based structures. The aim in this book is somewhat different; it is to demonstrate the versatility of the technique by showing how it can be utilized to prepare and explore a range of distinct and diverse materials. For each of these materials systems MBE has played a key role both in their development and application to devices.

Vacuum Deposition onto Webs: Films and Foils, Third Edition, provides the latest information on vacuum deposition, the technology that applies an even coating to a flexible material that can be held on a roll, thereby offering a much faster and cheaper method of bulk coating than deposition onto single pieces or non-flexible surfaces such as glass. This technology has been used in industrial-scale applications for some time, including a wide range of metalized packaging. Its potential as a high-speed, scalable process has seen an increasing range of new products emerging that employ this cost-effective technology, including solar energy products that are moving from rigid panels onto cheaper and more versatile flexible substrates, flexible electronic circuit 'boards', and flexible displays. In this third edition, all chapters are thoroughly revised with a significant amount of new information added, including newly developed barrier measurement techniques, improved in-vacuum monitoring technologies, and the latest developments in Atomic Layer Deposition (ALD). - Provides the know-how to maximize productivity of vacuum coating systems - Thoroughly revised with a significant amount of new information added, including newly developed barrier measurement techniques, improved in-vacuum monitoring technologies, and the latest on Atomic Layer Deposition (ALD) - Presents the latest information on vacuum deposition, the technology that applies an even coating to a flexible material that can be held on a roll, thereby offering a much faster and cheaper method of bulk coating - Enables engineers to specify systems more effectively and enhances dialogue between non-specialists and suppliers/engineers - Empowers those in rapidly expanding fields such as solar energy, display panels, and flexible electronics to unlock the potential of vacuum coating to transform their processes and products