Backscattering Spectrometry reviews developments in backscattering spectrometry and covers topics ranging from instrumentation and experimental techniques to beam parameters and energy loss measurements. Backscattering spectrometry of thin films is also considered, and examples of backscattering analysis are given. This book is comprised of 10 chapters and begins with an introduction to backscattering spectrometry, what it can and what it cannot accomplish, and some ""rules of thumb"" for interpreting or reading spectra. The relative strengths and weaknesses of backscattering spectrometry in the framework of materials analysis are outlined. The following chapters focus on kinematics, scattering cross sections, energy loss, and energy straggling; backscattering analysis of thin films of various degrees of complications; the influence of beam parameters; and mass and depth resolutions and their relationships to the mass and energy of projectiles. Many examples of backscattering analysis are also presented to illustrate the capability and limitation of backscattering. Backscattering applications when combined with channeling effects are considered as well. The final chapter provides a list of references on the applications of backscattering spectrometry. This monograph will be a useful resource for physicists.

From materials science to integrated circuit development, much of modern technology is moving from the microscale toward the nanoscale. This book focuses on the fundamental physics underlying innovative techniques for analyzing surfaces and near-surfaces. New analytical techniques have emerged to meet these technological requirements, all based on a few processes that govern the interactions of particles and radiation with matter. This book addresses the fundamentals and application of these processes, from thin films to field effect transistors.

The practical properties of many materials are dominated by surface and near-surface composition and structure. An understanding of how the surface region affects material properties starts with an understanding of the elemental composition of that region. Since the most common contaminants are light elements (for example, oxygen, nitrogen, carbon, and hydrogen), there is a clear need for an analytic probe that simultaneously and quantitatively records elemental profiles of all light elements. Energy recoil detection using high-energy heavy ions is unique in its ability to provide quantitative profiles of light and medium mass elements. As such this method holds great promise for the study of a variety of problems in a wide range of fields. While energy recoil detection is one of the newest and most promising ion beam analytic techniques, it is also the oldest in terms of when it was first described. Before discussing recent developments in this field, perhaps it is worth reviewing the early days of this century when the first energy recoil detection experiments were reported.

"Updates fundamentals and applications of all modes of x-ray spectrometry, including total reflection and polarized beam x-ray fluorescence analysis, and synchrotron radiation induced x-ray emission. Promotes the accurate measurement of samples while reducing the scattered background in the x-ray spectrum."