Nanotechnology, sensor and measurement industries depend on these advances in optical interferometry for accuracy and profitability.

This book presents readers with the latest research in interferometry. Chapters include research done on an approach that can be used to identify the performance of coherence scanning interferometers in the presence of vibration; the permeability engineering of semiconductor photonic devices; several interferometric structures based on bulk optics to achieving optical interleaving; interference lithography; recent results on laser surface patterning using interferometers and femtosecond laser radiation; the realisation of the optical interferometers with the optical MEMS technology; a simple two-ray interferometer tuned by rotation; tuning of interference pattern period by rotation of an interferometer itself; the characteristics of a two-ray interferometer with fixed mirrors; the detection of acoustic fields from bounded ultrasonic beams by using laser interferometry techniques; and the use of lateral shearing interferometry as an important area of general interferometry.

This book is for those who have some knowledge of optics, but little or no previous experience in interferometry. Accordingly, the carefully designed presentation helps readers easily find and assimilate the interferometric techniques they need for precision measurements. Mathematics is held to a minimum, and the topics covered are also summarized in capsule overviews at the beginning and end of each chapter. Each chapter also contains a set of worked problems that give a feel for numbers. The first five chapters present a clear tutorial review of fundamentals. Chapters six and seven discuss the types of lasers and photodetectors used in interferometry. The next eight chapters describe key applications of interferometry: measurements of length, optical testing, studies of refractive index fields, interference microscopy, holographic and speckle interferometry, interferometric sensors, interference spectroscopy, and Fourier-transform spectroscopy. The final chapter offers suggestions on choosing and setting up an interferometer.

Radar interferometers provide a cost-effective radar architecture to achieve enhanced angle accuracy for enhanced target tracking. The objective of this book is to quantify interferometer angle estimation accuracy by developing a general understanding of various radar interferometer architectures and presenting a comprehensive understanding of the effects of radar-based measurement errors on angle-of-arrival estimation. As such this book is primarily directed toward tracking radars but will also discuss imaging applications as well.