An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.

A comprehensive overview of the key techniques used in the fabrication of micron-scale structures in silicon; for graduate students and researchers.

Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.

"Preface -- Part I: Optoelectronic Sensors Technologies -- 1. Fiber and Integrated Optics Sensors: Fundamentals and Applications G. C. Righini, A. G. Mignani, I. Cacciari and M. Brenci -- 1. Introduction -- 2. Fiber and Integrated Optics: Fundamentals of Waveguiding -- 3. Waveguide Sensors: Basic Working Principle -- 4. Fiber Optic Sensors -- 5. Long-Period Optical Fiber Grating Sensors -- 6. Micro-structured Fiber Sensors -- 7. Integrated Optic Sensors -- 8. Conclusions -- References -- 2. Fiber Bragg Grating Sensors: Industrial Applications C. Ambrosino, A. Iadicicco, S. Campopiano, A. Cutolo, M. Giordano and A. Cusano -- 1. Introduction -- 2. Fiber Bragg Gratings History -- 3. Fiber Bragg Gratings as Sensors -- 4. Civil Applications -- 5. Aerospace Applications -- 6. Energy Applications -- 7. Oil and Gas Applications -- 8. Transport Applications -- 9. Underwater Applications -- 10. Perspective and Challenges -- References -- 3. Distributed Optical Fiber Sensors R. Bernini, A. Minardo and L. Zeni -- 1. Introduction -- 2. Linear Backscattering Systems -- 3. Non-Linear Backscattering Systems -- 4. Non-Linear Forward-Scattering Systems -- 5. Conclusions -- References -- 4. Lightwave Technologies for Interrogation Systems of Fiber Bragg Gratings Sensors D. Donisi, R. Beccherelli and A. d'Alessandro -- 1. Introduction -- 2. Operating Principle of the Fiber Bragg Grating Sensor -- 3. FBG Interrogation Techniques -- 4. An Integrated Tunable Filter using Composite Holographic Grating -- 5. POLICRYPS Filterbased FBG Sensors Interrogation -- 6. Conclusions -- Acknowledgments -- References -- 5. Surface Plasmon Resonance: Applications in Sensors and Biosensors R. Rella and M. G. Manera -- 1. Introduction -- 2. SPR Theory -- 3. Optical Sensors based on Surface Plasmon Resonance -- 4. Application of SPR in Chemical Sensors and Biosensors -- 5. SPR Instrumentation: From Traditional SPR Instrument to SPR Imaging -- 6. Future Capabilities -- References -- 6. Microresonators for Sensing Applications S. Berneschi, G. Nunzi Conti, S. Pelli and S. Soria -- 1. Introduction -- 2. Whispering Gallery Modes in a Microsphere -- 3. WGM Resonators: Applications in Sensing -- Acknowledgments -- References -- 7. Photonic Crystals: Towards a Novel Generation of Integrated Optical Devices for Chemical and Biological Detection A. Ricciardi, C. Ciminelli, M. Pisco, S. Campopiano, C. E. Campanella, E. Scivittaro, M. N. Armenise, A. Cutolo and A. Cusano -- 1. Introduction -- 2. Photonic Crystals 190; Fundamental Principles -- 3. Functional Photonic Band Gap Components and Devices -- 4. Photonic Crystals for Chemical and Biological Sensing -- 5. Photonic Crystal Fibers Sensors -- 6. Perspectives and Challenges -- References -- 8. Micromachining Technologies for Sensor Applications P. M. Sarro, A. Irace and P. J. French -- 1. Introduction -- 2. Bulk Micromachining -- 3. Surface Micromachining -- 4. Characterization of Thin Film Membranes -- 5. Conclusions and Outlook -- References -- 9. Spectroscopic Techniques for Sensors S. Pelli, A. Chiasera, M. Ferrari and G. C. Righini -- 1. Introduction -- 2. Absorption, Reflectance and Transmission Measurements -- 3. Luminescence Measurements -- 4. Raman and Brillouin Measurements -- 5. Conclusions -- References -- 10. Laser Doppler Vibrometry P. Castellini, G. M. Revel". -- OCLC.

Microrobotics is an emerging and booming area with many and various applications, including in fields such as industrial/manufacturing robotics, medical robotics, and laboratory instrumentation. Microrobotics for Micromanipulation presents for the first time, in detail, a treatment of the field of robotics dedicated to handling objects of micrometer dimensions. At these dimensions, the behavior of objects is significantly different from the better known, larger scales, which leads to implementation techniques that can be radically different from the more commonly used solutions. This book details the behaviors of objects at the micrometer scale and provides robotics solutions that are suitable, in terms of actuators, grippers, manipulators, environmental perception, and microtechnology. Worked examples are included in the book - enabling engineers, students and researchers to familiarize themselves with this emerging area and to contribute to its development.

The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS. The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.