Alternative Lithography
Title | Alternative Lithography PDF eBook |
Author | Clivia M. Sotomayor Torres |
Publisher | Springer Science & Business Media |
Pages | 343 |
Release | 2012-12-06 |
Genre | Science |
ISBN | 1441992049 |
Good old Gutenberg could not have imagined that his revolutionary printing concept which so greatly contributed to dissemination of knowledge and thus today 's wealth, would have been a source of inspiration five hundred years later. Now, it seems intuitive that a simple way to produce a large number of replicates is using a mold to emboss pattern you need, but at the nanoscale nothing is simple: the devil is in the detail. And this book is about the "devil". In the following 17 chapters, the authors-all of them well recognized and active actors in this emerging field-describe the state-of-the-art, today 's technological bottlenecks and the prospects for micro-contact printing and nanoimprint lithography. Many results of this book originate from projects funded by the European Com mission through its "Nanotechnology Information Devices" (NID) initiative. NID was launched with the objective to develop nanoscale devices for the time when the red brick scenario of the ITRS roadmap would be reached. It became soon clear however, that there was no point to investigate only alternative devices to CMOS, but what was really needed was an integrated approach that took into account more facets of this difficult undertaking. Technologically speaking , this meant to have a coherent strategy to develop novel devices, nanofabrication tools and circuit & system architectures at the same time.
Alternative Lithography
Title | Alternative Lithography PDF eBook |
Author | Clivia M Sotomayor Torres |
Publisher | |
Pages | 360 |
Release | 2003-12-01 |
Genre | |
ISBN | 9781441992055 |
Principles of Lithography
Title | Principles of Lithography PDF eBook |
Author | Harry J. Levinson |
Publisher | SPIE Press |
Pages | 446 |
Release | 2005 |
Genre | Technology & Engineering |
ISBN | 9780819456601 |
Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
Optical and EUV Lithography
Title | Optical and EUV Lithography PDF eBook |
Author | Andreas Erdmann |
Publisher | |
Pages | |
Release | 2021-02 |
Genre | |
ISBN | 9781510639010 |
Materials and Processes for Next Generation Lithography
Title | Materials and Processes for Next Generation Lithography PDF eBook |
Author | |
Publisher | Elsevier |
Pages | 636 |
Release | 2016-11-08 |
Genre | Science |
ISBN | 0081003587 |
As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication. Assembles up-to-date information from the world’s premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigation Includes information on processing and metrology techniques Brings together multiple approaches to litho pattern recording from academia and industry in one place
Alternative Lithography Strategies for Flexible Electronics
Title | Alternative Lithography Strategies for Flexible Electronics PDF eBook |
Author | Pieter Frederik Moonen |
Publisher | |
Pages | 175 |
Release | 2012 |
Genre | |
ISBN | 9789036533713 |
Fundamentals of Terahertz Devices and Applications
Title | Fundamentals of Terahertz Devices and Applications PDF eBook |
Author | Dimitris Pavlidis |
Publisher | John Wiley & Sons |
Pages | 576 |
Release | 2021-07-19 |
Genre | Technology & Engineering |
ISBN | 1119460735 |
An authoritative and comprehensive guide to the devices and applications of Terahertz technology Terahertz (THz) technology relates to applications that span in frequency from a few hundred GHz to more than 1000 GHz. Fundamentals of Terahertz Devices and Applications offers a comprehensive review of the devices and applications of Terahertz technology. With contributions from a range of experts on the topic, this book contains in a single volume an inclusive review of THz devices for signal generation, detection and treatment. Fundamentals of Terahertz Devices and Applications offers an exploration and addresses key categories and aspects of Terahertz Technology such as: sources, detectors, transmission, electronic considerations and applications, optical (photonic) considerations and applications. Worked examples—based on the contributors' extensive experience— highlight the chapter material presented. The text is designed for use by novices and professionals who want a better understanding of device operation and use, and is suitable for instructional purposes This important book: Offers the most relevant up-to-date research information and insight into the future developments in the technology Addresses a wide-range of categories and aspects of Terahertz technology Includes material to support courses on Terahertz Technology and more Contains illustrative worked examples Written for researchers, students, and professional engineers, Fundamentals of Terahertz Devices and Applications offers an in-depth exploration of the topic that is designed for both novices and professionals and can be adopted for instructional purposes.