Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

The book presents current R&D and new trends in the field of solar cell technologies. Topics covered include fabrication methods, various types of cell design, versatile applications of solar cells, PEDOT:PSS thermoelectric materials, transparent conducting electrodes, simulation models for solar photovoltaic materials, and hybrid materials for solar cells. Keywords: Optoelectronic Devices, PEDOT:PSS Materials, Nanomaterials, Transparent Electrodes, Hybrid Solar Cell Materials, Simulation Models, Solar Cell Design, Solar Cell Applications.

The European Photovoltaic Solar Energy Conferences are dedicated to accelerating the impetus towards sustainable development of global PV markets. The 16th in the series, held in Glasgow UK, brought together more than 1500 delegates from 72 countries, and provided an important and vital forum for information exchange in the field. The Conference Proceedings place on record a new phase of market development and scientific endeavour in the PV industry, representing current and innovative thinking in all aspects of the science, technology, markets and business of photovoltaics. In three volumes, the Proceedings present some 790 papers selected for presentation by the scientific review committee of the 16th European Photovoltaic Solar Energy Conference. The comprehensive range of topics covered comprise: * Fundamentals, Novel Devices and New Materials * Thin Film Cells and Technologies * Space Cells and Systems * Crystalline Silicon Solar Cells and Technologies * PV Integration in Buildings * PV Modules and Components of PV Systems * Implementation, Strategies, National Programs and Financing Schemes * Market Deployment in Developing Countries These proceedings are an essential reference for all involved in the global PV industry- scientists, researchers, technologists and those with an interest in global market trends. The conference was organised by WIP-Renewable Energies, Munich, Germany.

Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical and their technological aspects. Volume 29 consists of chapters pulled from Hari Singh Nalwa's forthcoming Handbook of Thin Film Materials (ISBN: 0-12-512908-4). The chapters were selected because they deal exclusively with amorphous film structures and because they have a common relevance to semiconductor, or electronic, devices and circuits. These are subjects not yet stressed in the Thin Films series.