This book explores emerging methods and algorithms that enable precise control of micro-/nano-positioning systems. The text describes three control strategies: hysteresis-model-based feedforward control and hysteresis-model-free feedback control based on and free from state observation. Each paradigm receives dedicated attention within a particular part of the text. Readers are shown how to design, validate and apply a variety of new control approaches in micromanipulation: hysteresis modelling, discrete-time sliding-mode control and model-reference adaptive control. Experimental results are provided throughout and build up to a detailed treatment of practical applications in the fourth part of the book. The applications focus on control of piezoelectric grippers. Advanced Control of Piezoelectric Micro-/Nano-Positioning Systems will assist academic researchers and practising control and mechatronics engineers interested in suppressing sources of nonlinearity such as hysteresis and drift when combining position and force control of precision systems with piezoelectric actuation.

“Piezoelectric-Based Vibration-control Systems: Applications in Micro/Nano Sensors and Actuators” covers: Fundamental concepts in smart (active) materials including piezoelectric and piezoceramics, magnetostrictive, shape-memory materials, and electro/magneto-rheological fluids; Physical principles and constitutive models of piezoelectric materials; Piezoelectric sensors and actuators; Fundamental concepts in mechanical vibration analysis and control with emphasis on distributed-parameters and vibration-control systems; and Recent advances in piezoelectric-based microelectromechanical and nanoelectromechanical systems design and implementation.

An innovative and timely guide to the modeling, design and implementation of large-range compliant micropositioning systems based on flexure hinges Features innovative compact mechanism designs for large-range translational and rotational positioning Provides original and concise treatment of various flexure hinges with well-presented design and control methods Focuses on design implementation and applications through detailed examples

Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control. Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging. Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.

The aim of this thesis is to show how the robust H1 control method can be applied to fast tracking position control problems in nano-positioning and atomic force microscopy. The key component used in the nano-positioning system and atomic force microscope positioning system is a piezoelectric actuator which makes motion control at the sub-nanometer level possible. A significant challenging issue in the use of piezoelectric actuators is the existence of hysteresis nonlinearity which limits the accuracy of position control. This research involves designing three robust H1 tracking controllers for three different systems: controlling hysteresis nonlinearity in a piezoelectric stack actuator using a charge output, controlling displacement tracking in a nano-positioning system, and improving fast tracking in a position control problem for an atomic force microscope (AFM). The approach considered in this research is to utilize H1 control theory to control piezoelectric actuator systems with hysteresis nonlinearity. These robust H1 controllers were designed based on physical models for these three systems considering both mechanical and electrical sides separately. The parameters used in the nonlinear models were obtained from experimental measurements. Experimental results showed that the robust H1 controller yields highly accurate tracking of displacement and also significantly reduces the nonlinear hysteresis. Each robust H1 controller was implemented in a dSpace DSP system. The experimental results obtained using the robust H1 controllers have been analysed and discussed in this thesis. This research has provided good evidence to demonstrate that high levels of accuracy in tracking displacement can be achieved by using the robust H1 control method in nano-positioning systems.

The three-volume set CCIS 761, CCIS 762, and CCIS 763 constitutes the thoroughly refereed proceedings of the International Conference on Life System Modeling and Simulation, LSMS 2017, and of the International Conference on Intelligent Computing for Sustainable Energy and Environment, ICSEE 2017, held in Nanjing, China, in September 2017. The 208 revised full papers presented were carefully reviewed and selected from over 625 submissions. The papers of this volume are organized in topical sections on: Biomedical Signal Processing; Computational Methods in Organism Modeling; Medical Apparatus and Clinical Applications; Bionics Control Methods, Algorithms and Apparatus; Modeling and Simulation of Life Systems; Data Driven Analysis; Image and Video Processing; Advanced Fuzzy and Neural Network Theory and Algorithms; Advanced Evolutionary Methods and Applications; Advanced Machine Learning Methods and Applications; Intelligent Modeling, Monitoring, and Control of Complex Nonlinear Systems; Advanced Methods for Networked Systems; Control and Analysis of Transportation Systems; Advanced Sliding Mode Control and Applications; Advanced Analysis of New Materials and Devices; Computational Intelligence in Utilization of Clean and Renewable Energy Resources; Intelligent Methods for Energy Saving and Pollution Reduction; Intelligent Methods in Developing Electric Vehicles, Engines and Equipment; Intelligent Computing and Control in Power Systems; Modeling, Simulation and Control in Smart Grid and Microgrid; Optimization Methods; Computational Methods for Sustainable Environment.

This book provides an overview of the noteworthy developments in the field of micromachining, with a specific focus on microinjection systems used for biological micromanipulation. The author also explores the design, development, and fabrication of new mechanical designs for micromachines, with plenty of examples that elucidate their modeling and control. The design and fabrication of a piezoelectric microinjector, constant force microinjector, constant force microgripper, PDVF microforce sensor, and a piezoelectric microsyringe are presented as examples of new technology for microinjection systems. This book is appropriate for both researchers and advanced students in bioengineering.