A Study of Process Optimization and Inhomogeneous Electro-optical Properties for ITO Thin Films Prepared by DC Magnetron Sputtering
Title | A Study of Process Optimization and Inhomogeneous Electro-optical Properties for ITO Thin Films Prepared by DC Magnetron Sputtering PDF eBook |
Author | 曾坤三 |
Publisher | |
Pages | 150 |
Release | 2014 |
Genre | |
ISBN |
Growth and Characterization of Ito Thin Film by Magnetron Sputtering
Title | Growth and Characterization of Ito Thin Film by Magnetron Sputtering PDF eBook |
Author | Öcal Tuna |
Publisher | LAP Lambert Academic Publishing |
Pages | 100 |
Release | 2010-05 |
Genre | |
ISBN | 9783838365695 |
In this study Indium Tin Oxide (ITO) thin films were grown by both DC and RF magnetron sputtering techniques. To know deposition rate of ITO, system was calibrated for both DCMS and RFMS and then ITO were grown on glass substrate with the thickness of 70 nm and 40 nm by changing substrate temperature. The effect of substrate temperature, film thickness and sputtering method on structural, electrical and optical properties were investigated. The results show that substrate temperature and film thickness substantially affects the film properties, especially crystallization and resistivity. The thin films grown at the lower than 150 oC showed amorphous structure. However, crystallization was detected with the furtherincrease of substrate temperature. Band gap of ITO was calculated to be about 3.64eV at the substrate temperature of 150 oC, and itwidened with substrate temperature increment. From electrical measurements the resistivity at room temperature was obtained 1.28x10-4 and 1.29x10-4 D-cm, for DC and RF sputtered films, respectively. We also measured temperature dependence resistivity and the Hall coefficient of the films, and we calculated carrier concentration and Hall mobility."
Fabrication and Study of ITO Thin Films Prepared by Magnetron Sputtering
Title | Fabrication and Study of ITO Thin Films Prepared by Magnetron Sputtering PDF eBook |
Author | Zhaohui Qiao |
Publisher | |
Pages | 292 |
Release | 2003 |
Genre | |
ISBN |
Study of Indium Tin Oxide (ITO) Thin Films Prepared by Pulsed DC Facing-target Sputtering (FTS)
Title | Study of Indium Tin Oxide (ITO) Thin Films Prepared by Pulsed DC Facing-target Sputtering (FTS) PDF eBook |
Author | Chi Keung Fung |
Publisher | |
Pages | |
Release | 2000 |
Genre | Thin films |
ISBN |
Advanced Strategies in Thin Film Engineering by Magnetron Sputtering
Title | Advanced Strategies in Thin Film Engineering by Magnetron Sputtering PDF eBook |
Author | Alberto Palmero |
Publisher | MDPI |
Pages | 148 |
Release | 2020-12-10 |
Genre | Science |
ISBN | 3039364294 |
Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reactor, among others. At the forefront of these approaches, investigations focused on nanostructured coatings appear today as one of the priorities in many scientific and technological communities: The science behind them appears in most of the cases as a "terra incognita", fascinating both the fundamentalist, who imagines new concepts, and the experimenter, who is able to create and study new films with as of yet unprecedented performances. These scientific and technological challenges, along with the existence of numerous scientific issues that have yet to be clarified in classical magnetron sputtering depositions (e.g., process control and stability, nanostructuration mechanisms, connection between film morphology and properties or upscaling procedures from the laboratory to industrial scales) have motivated us to edit a specialized volume containing the state-of-the art that put together these innovative fundamental and applied research topics. These include, but are not limited to: • Nanostructure-related properties; • Atomistic processes during film growth; • Process control, process stability, and in situ diagnostics; • Fundamentals and applications of HiPIMS; • Thin film nanostructuration phenomena; • Tribological, anticorrosion, and mechanical properties; • Combined procedures based on the magnetron sputtering technique; • Industrial applications; • Devices.
Transparent Conducting Pure and Tin Doped Indium Oxide Films - Preparation and Characterization
Title | Transparent Conducting Pure and Tin Doped Indium Oxide Films - Preparation and Characterization PDF eBook |
Author | Dr. B. Radhakrishna |
Publisher | Lulu.com |
Pages | 132 |
Release | 2019-03-26 |
Genre | Education |
ISBN | 0359510280 |
Badeker in 1907 observed that some materials are optically transparent in the visible light and electrically conducting [1]. Because of the increasing interest in electrically and electronically active materials, the search for materials and the techniques for producing semi-transparent electrically conducting films have gained much importance. In an intrinsic stoichiometric material, it is not possible to have simultaneously high transparency (>80%%) in the visible region and high electrical conductivity (>103 Ω cm-1). A variety of metals in thin film form (
Optimized Indium Oxide Films Prepared by DC Magnetron Sputtering
Title | Optimized Indium Oxide Films Prepared by DC Magnetron Sputtering PDF eBook |
Author | Gady Golan |
Publisher | |
Pages | |
Release | 1996 |
Genre | |
ISBN |