A Low Pressure Chemical Vapor Deposition Process for Titanium Disilicide Films with and Without Plasma Enhancement
Title | A Low Pressure Chemical Vapor Deposition Process for Titanium Disilicide Films with and Without Plasma Enhancement PDF eBook |
Author | Jaegab Lee |
Publisher | |
Pages | 270 |
Release | 1991 |
Genre | |
ISBN |
A Very Low Pressure Chemical Vapor Deposition Process for Blanket and Selective Titanium Silicide Films
Title | A Very Low Pressure Chemical Vapor Deposition Process for Blanket and Selective Titanium Silicide Films PDF eBook |
Author | Vida Ilderem |
Publisher | |
Pages | 458 |
Release | 1988 |
Genre | |
ISBN |
Plasma-enhanced Chemical Vapor Deposition of Titanium Silicide
Title | Plasma-enhanced Chemical Vapor Deposition of Titanium Silicide PDF eBook |
Author | Edwin Earl Cervantes |
Publisher | |
Pages | 312 |
Release | 1985 |
Genre | |
ISBN |
Handbook of Chemical Vapor Deposition
Title | Handbook of Chemical Vapor Deposition PDF eBook |
Author | Hugh O. Pierson |
Publisher | William Andrew |
Pages | 459 |
Release | 2012-12-02 |
Genre | Technology & Engineering |
ISBN | 1437744885 |
Handbook of Chemical Vapor Deposition: Principles, Technology and Applications provides information pertinent to the fundamental aspects of chemical vapor deposition. This book discusses the applications of chemical vapor deposition, which is a relatively flexible technology that can accommodate many variations. Organized into 12 chapters, this book begins with an overview of the theoretical examination of the chemical vapor deposition process. This text then describes the major chemical reactions and reviews the chemical vapor deposition systems and equipment used in research and production. Other chapters consider the materials deposited by chemical vapor deposition. This book discusses as well the potential applications of chemical vapor deposition in semiconductors and electronics. The final chapter deals with ion implantation as a major process in the fabrication of semiconductors. This book is a valuable resource for scientists, engineers, and students. Production and marketing managers and suppliers of equipment, materials, and services will also find this book useful.
Research in Materials
Title | Research in Materials PDF eBook |
Author | |
Publisher | |
Pages | 440 |
Release | 1990 |
Genre | Materials |
ISBN |
Low Pressure and Plasma Enhanced Chemical Vapor Deposition of Molybdenum Oxide Films
Title | Low Pressure and Plasma Enhanced Chemical Vapor Deposition of Molybdenum Oxide Films PDF eBook |
Author | Jeffrey Scott Cross |
Publisher | |
Pages | 202 |
Release | 1992 |
Genre | |
ISBN |
Official Gazette of the United States Patent and Trademark Office
Title | Official Gazette of the United States Patent and Trademark Office PDF eBook |
Author | United States. Patent and Trademark Office |
Publisher | |
Pages | 1440 |
Release | 1999 |
Genre | Patents |
ISBN |