The Design and Testing of a Compact Electron Cyclotron Resonant Microwave-cavity Ion Source
Title | The Design and Testing of a Compact Electron Cyclotron Resonant Microwave-cavity Ion Source PDF eBook |
Author | Leonard Joseph Mahoney |
Publisher | |
Pages | 364 |
Release | 1989 |
Genre | Ion sources |
ISBN |
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An Electron Cyclotron Resonant, Microwave Resonant Cavity Lithium Plasma Source
Title | An Electron Cyclotron Resonant, Microwave Resonant Cavity Lithium Plasma Source PDF eBook |
Author | Cynthia Bush Brooks |
Publisher | |
Pages | 278 |
Release | 1995 |
Genre | |
ISBN |
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The Electromagnetic Evaluation of a Compact ECR Microwave Plasma Source
Title | The Electromagnetic Evaluation of a Compact ECR Microwave Plasma Source PDF eBook |
Author | Mark Alan Perrin |
Publisher | |
Pages | 332 |
Release | 1996 |
Genre | Electromagnetic measurements |
ISBN |
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Experimental Characterization of a Compact MPDR Plasma Source Employing Three Different Coupling Geometries
Title | Experimental Characterization of a Compact MPDR Plasma Source Employing Three Different Coupling Geometries PDF eBook |
Author | Amir Halim Khan |
Publisher | |
Pages | 340 |
Release | 1999 |
Genre | Electromagnetic measurements |
ISBN |
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Macroscopic Properties of a Multipolar Electron Cyclotron Resonance Microwave-cavity Plasma Source for Anisotropic Silicon Etching
Title | Macroscopic Properties of a Multipolar Electron Cyclotron Resonance Microwave-cavity Plasma Source for Anisotropic Silicon Etching PDF eBook |
Author | Jeffrey Alan Hopwood |
Publisher | |
Pages | 538 |
Release | 1990 |
Genre | Cyclotron resonance |
ISBN |
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3D3V Simulation of Electron Cyclotron Resonance Plasmas
Title | 3D3V Simulation of Electron Cyclotron Resonance Plasmas PDF eBook |
Author | Venkatesh P. Gopinath |
Publisher | |
Pages | 396 |
Release | 1994 |
Genre | Cyclotron resonance |
ISBN |
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Design and Experimental Investigation of a Large Diameter Electron Cyclotron Resonant Plasma Source
Title | Design and Experimental Investigation of a Large Diameter Electron Cyclotron Resonant Plasma Source PDF eBook |
Author | Fan Cheung Sze |
Publisher | |
Pages | 574 |
Release | 1993 |
Genre | Cyclotron resonance |
ISBN |
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