The Design and Testing of a Compact Electron Cyclotron Resonant Microwave-cavity Ion Source

The Design and Testing of a Compact Electron Cyclotron Resonant Microwave-cavity Ion Source
Title The Design and Testing of a Compact Electron Cyclotron Resonant Microwave-cavity Ion Source PDF eBook
Author Leonard Joseph Mahoney
Publisher
Pages 364
Release 1989
Genre Ion sources
ISBN

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An Electron Cyclotron Resonant, Microwave Resonant Cavity Lithium Plasma Source

An Electron Cyclotron Resonant, Microwave Resonant Cavity Lithium Plasma Source
Title An Electron Cyclotron Resonant, Microwave Resonant Cavity Lithium Plasma Source PDF eBook
Author Cynthia Bush Brooks
Publisher
Pages 278
Release 1995
Genre
ISBN

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The Electromagnetic Evaluation of a Compact ECR Microwave Plasma Source

The Electromagnetic Evaluation of a Compact ECR Microwave Plasma Source
Title The Electromagnetic Evaluation of a Compact ECR Microwave Plasma Source PDF eBook
Author Mark Alan Perrin
Publisher
Pages 332
Release 1996
Genre Electromagnetic measurements
ISBN

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Experimental Characterization of a Compact MPDR Plasma Source Employing Three Different Coupling Geometries

Experimental Characterization of a Compact MPDR Plasma Source Employing Three Different Coupling Geometries
Title Experimental Characterization of a Compact MPDR Plasma Source Employing Three Different Coupling Geometries PDF eBook
Author Amir Halim Khan
Publisher
Pages 340
Release 1999
Genre Electromagnetic measurements
ISBN

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Macroscopic Properties of a Multipolar Electron Cyclotron Resonance Microwave-cavity Plasma Source for Anisotropic Silicon Etching

Macroscopic Properties of a Multipolar Electron Cyclotron Resonance Microwave-cavity Plasma Source for Anisotropic Silicon Etching
Title Macroscopic Properties of a Multipolar Electron Cyclotron Resonance Microwave-cavity Plasma Source for Anisotropic Silicon Etching PDF eBook
Author Jeffrey Alan Hopwood
Publisher
Pages 538
Release 1990
Genre Cyclotron resonance
ISBN

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3D3V Simulation of Electron Cyclotron Resonance Plasmas

3D3V Simulation of Electron Cyclotron Resonance Plasmas
Title 3D3V Simulation of Electron Cyclotron Resonance Plasmas PDF eBook
Author Venkatesh P. Gopinath
Publisher
Pages 396
Release 1994
Genre Cyclotron resonance
ISBN

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Design and Experimental Investigation of a Large Diameter Electron Cyclotron Resonant Plasma Source

Design and Experimental Investigation of a Large Diameter Electron Cyclotron Resonant Plasma Source
Title Design and Experimental Investigation of a Large Diameter Electron Cyclotron Resonant Plasma Source PDF eBook
Author Fan Cheung Sze
Publisher
Pages 574
Release 1993
Genre Cyclotron resonance
ISBN

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