Synthesis of Hafnium Silylamide Complexes and the Chemical Vapor Deposition of (HfO2)x(SiO2)y Films

Synthesis of Hafnium Silylamide Complexes and the Chemical Vapor Deposition of (HfO2)x(SiO2)y Films
Title Synthesis of Hafnium Silylamide Complexes and the Chemical Vapor Deposition of (HfO2)x(SiO2)y Films PDF eBook
Author Edixa de Lourdes Jiménez
Publisher
Pages 58
Release 2007
Genre Hafnium compounds
ISBN

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