An indispensable resource for scientists and engineers concerned with high vacuum technology Vacuum technology has evolved significantly over the past thirty years and is now indispensable to various fields of scientific research as well as the medical technology, food processing, aerospace, and electronics industries. Foundations of Vacuum Science and Technology offers a comprehensive survey of the physical and chemical principles underlying the production, measurement, and use of high vacuums. It also provides a valuable critical survey of important developments that have occurred in the field over the past several decades. Comprising contributions from many of the world's leading specialists in vacuum techniques, Foundations of Vacuum Science and Technology: * Reviews the laws of kinetics, the principles of gas flow over a wide range of pressures, and the behaviors of both compressible and turbulent flows * Features exhaustive coverage of vacuum pump technology, including liquid ring pumps, dry pumps, turbo pumps, getter pumps, and cryo pumps * Describes leak detectors used in industry * Examines all types of pressure measurement techniques, including the latest quadrupole mass spectrometer techniques for partial pressure analysis * Explores the state of the art in calibration and standards.

This comprehensive, standard work has been updated to remain an important resource for all those needing detailed knowledge of the theory and applications of vacuum technology. The text covers the existing knowledge on all aspects of vacuum science and technology, ranging from fundamentals to components and operating systems. It features many numerical examples and illustrations to help visualize the theoretical issues, while the chapters are carefully cross-linked and coherent symbols and notations are used throughout the book. The whole is rounded off by a user-friendly appendix of conversion tables, mathematical tools, material related data, overviews of processes and techniques, equipment-related data, national and international standards, guidelines, and much more. As a result, engineers, technicians, and scientists will be able to develop and work successfully with the equipment and environment found in a vacuum.

A comprehensive standard work and important resource for both students and professionals in research and industry who need detailed knowledge of the theory and applications. Many numerical examples and numerous illustrations visualize the theoretical issues, backed by many useful tables and charts, plus over 500 illustrations. The Handbook discusses the latest developments in vacuum measurement techniques and leak detection in vacuum systems, as well as the connection of vacuum systems to computerized control systems.

The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries. - History and detailed descriptions of Vacuum Deposition Technologies - Review of Enabling Technologies and their importance to current applications - Extensively referenced text - Patents are referenced as part of the history - Historical Timelines for Vacuum Coating Technology and Vacuum/Plasma Technology - Glossary of Terms for vacuum coating