Plasma Enhanced Chemical Vapor Deposition of Silicon Oxycarbide Thin Films
| Title | Plasma Enhanced Chemical Vapor Deposition of Silicon Oxycarbide Thin Films PDF eBook |
| Author | Gina Marie Buccellato |
| Publisher | |
| Pages | 230 |
| Release | 1992 |
| Genre | |
| ISBN |
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Study of Plasma-enhanced Chemical Vapor Deposition of Silicon Thin Films
| Title | Study of Plasma-enhanced Chemical Vapor Deposition of Silicon Thin Films PDF eBook |
| Author | Guanghui Yao |
| Publisher | |
| Pages | 148 |
| Release | 1997 |
| Genre | Plasma-enhanced chemical vapor deposition |
| ISBN |
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Plasma-Enhanced Chemical Vapor Deposition of Silicon and Silicon-Containing Films
| Title | Plasma-Enhanced Chemical Vapor Deposition of Silicon and Silicon-Containing Films PDF eBook |
| Author | DW. Hess |
| Publisher | |
| Pages | 8 |
| Release | 1983 |
| Genre | Chemical vapor deposition |
| ISBN |
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The use of a radio frequency (rf) glow discharge or plasma has recently come into favor for the deposition of thin films. In plasma-enhanced chemical vapor deposition (PECVD), chemical reactions can be carried out at low (
Study on Amorphous Silicon Thin Films by Plasma-enhanced Chemical Vapor Deposition
| Title | Study on Amorphous Silicon Thin Films by Plasma-enhanced Chemical Vapor Deposition PDF eBook |
| Author | Reddy S. Pingali |
| Publisher | |
| Pages | 270 |
| Release | 1996 |
| Genre | |
| ISBN |
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Plasma Enhanced Chemical Vapor Deposition of Thin Films and New Crystalline Model Compounds in the Systems Silicon-sulfur and Phosphorus-sulfur
| Title | Plasma Enhanced Chemical Vapor Deposition of Thin Films and New Crystalline Model Compounds in the Systems Silicon-sulfur and Phosphorus-sulfur PDF eBook |
| Author | Robert Ko Shibao |
| Publisher | |
| Pages | 392 |
| Release | 1995 |
| Genre | |
| ISBN |
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Plasma Enhanced Chemical Vapor Deposition of Hydrogenated Amorphous Silicon Thin Films with Nanocrystalline Inclusions
| Title | Plasma Enhanced Chemical Vapor Deposition of Hydrogenated Amorphous Silicon Thin Films with Nanocrystalline Inclusions PDF eBook |
| Author | Siri Suzanne Thompson |
| Publisher | |
| Pages | 138 |
| Release | 2003 |
| Genre | |
| ISBN |
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Plasma Enhanced Chemical Vapor Deposition of Silicon Based Thin Film Materials
| Title | Plasma Enhanced Chemical Vapor Deposition of Silicon Based Thin Film Materials PDF eBook |
| Author | Ashfaqul Islam Chowdhury |
| Publisher | |
| Pages | 374 |
| Release | 1999 |
| Genre | Plasma-enhanced chemical vapor deposition |
| ISBN |
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