Plasma-Enhanced Chemical Vapor Deposition of Silicon and Silicon-Containing Films
Title | Plasma-Enhanced Chemical Vapor Deposition of Silicon and Silicon-Containing Films PDF eBook |
Author | DW. Hess |
Publisher | |
Pages | 8 |
Release | 1983 |
Genre | Chemical vapor deposition |
ISBN |
The use of a radio frequency (rf) glow discharge or plasma has recently come into favor for the deposition of thin films. In plasma-enhanced chemical vapor deposition (PECVD), chemical reactions can be carried out at low (
Plasma Enhanced Chemical Vapor Deposition of Silicon Based Thin Film Materials
Title | Plasma Enhanced Chemical Vapor Deposition of Silicon Based Thin Film Materials PDF eBook |
Author | Ashfaqul Islam Chowdhury |
Publisher | |
Pages | 374 |
Release | 1999 |
Genre | Plasma-enhanced chemical vapor deposition |
ISBN |
Study of Plasma-enhanced Chemical Vapor Deposition of Silicon Thin Films
Title | Study of Plasma-enhanced Chemical Vapor Deposition of Silicon Thin Films PDF eBook |
Author | Guanghui Yao |
Publisher | |
Pages | 148 |
Release | 1997 |
Genre | Plasma-enhanced chemical vapor deposition |
ISBN |
Silicon Processing
Title | Silicon Processing PDF eBook |
Author | SYMPOSIUM ON SILICON PROCESSING. (1982 : SAN JOSE) AUTOR |
Publisher | ASTM International |
Pages | 562 |
Release | 1983 |
Genre | |
ISBN |
Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride and Oxynitride Films Using Disilane as Silicon Source
Title | Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride and Oxynitride Films Using Disilane as Silicon Source PDF eBook |
Author | Giridhar Nallapati |
Publisher | |
Pages | 108 |
Release | 1999 |
Genre | |
ISBN |
Carbide, Nitride and Boride Materials Synthesis and Processing
Title | Carbide, Nitride and Boride Materials Synthesis and Processing PDF eBook |
Author | A.W. Weimer |
Publisher | Springer Science & Business Media |
Pages | 675 |
Release | 2012-12-06 |
Genre | Technology & Engineering |
ISBN | 9400900716 |
Carbide, Nitride and Boride Materials Synthesis and Processing is a major reference text addressing methods for the synthesis of non-oxides. Each chapter has been written by an expert practising in the subject area, affiliated with industry, academia or government research, thus providing a broad perspective of information for the reader. The subject matter ranges from materials properties and applications to methods of synthesis including pre- and post-synthesis processing. Although most of the text is concerned with the synthesis of powders, chapters are included for other materials such as whiskers, platelets, fibres and coatings. Carbide, Nitride and Boride Materials Synthesis and Processing is a comprehensive overview of the subject and is suitable for practitioners in the industry as well as those looking for an introduction to the field. It will be of interest to chemical, mechanical and ceramic engineers, materials scientists and chemists in both university and industrial environments working on or with refractory carbides, nitrides and borides.
Plasma Enhanced Chemical Vapor Deposition of Silicon Oxycarbide Thin Films
Title | Plasma Enhanced Chemical Vapor Deposition of Silicon Oxycarbide Thin Films PDF eBook |
Author | Gina Marie Buccellato |
Publisher | |
Pages | 230 |
Release | 1992 |
Genre | |
ISBN |