Electron emission is a fundamental phenomenon which accompanies most interactions of energetic particles with solid surfaces. Not only is it a special effect which for almost ninety years has attracted the interest of physicists, but it is also of acute importance in such fields as radiation effects and transport phenomena in solids (e.g., radiation biology), plasma-surface interactions, microtechnology, surface analysis, ion microscopies, particle detector development and others. While Volume I emphasizes the theoretical description of the mechanisms of electron emission, this volume reviews modern experimental trends and aspects of the phenomenon, e.g., kinetic electron emission from massive solids and from thin foils under bombardment with positive, negative, and neutral particles, and the measurement of electron statistics in connection with potential and kinetic emission due to slow singly and multiply charged projectiles.

The emission of electrons from solid surfaces bombarded by slow neutral and ionized heavy particles (atoms, molecules) is reviewed both theoretically and in the light of recent experimental studies by leading groups in the field. The book integrates physics of ion beams, surfaces and chemical physics, and serves both as a reference work for researchers and a textbook for graduate students.

This monograph discusses collision-induced electron emission from nearly free-electron metals by ion or electron impact. This subject is, as is well known, of acute importance in understanding plasma-wall interactions in thermonuclear reactors. It is also the basis for one of the most exciting technological developments of the last few years - scanning electron miscroscopy. Several electron excitation mechanisms of electrons in the target are considered: excitation of single conduction and core electrons, excitation by plasmon decay and by Auger processes. Transport of inner excited electrons is simulated by the Boltzmann equation incorporating both elastic and inelastic collisions. The numerical calculation of scattering rates uses a dynamically screened Coulomb interaction. These results for the energy distributions of emerging electrons as well as the electron yield are compared with recent experimental measurements on electron emission from polycrystalline aluminum.

This monograph deals with ion induced electron emission from crystalline solids bombarded by fast ions. During the past decade, electron spectroscopy combined with the ion channeling technique has revealed various "messages" about ion solid and electron solid interactions carried by the emitted elec trons. While the ion induced electrons produced by binary encounter pro cesses are of primary interest in this book, closely related topics such as the emission of ion induced Auger electrons from crystal targets are also reviewed, with emphasis on their interdisciplinary aspects, for example, their relation to photoelectron diffraction. In addition to these topics, the book describes the underlying physics and experimental techniques so that it should provide useful information for students and scientists working in ion beam based re search and development in various areas of atomic and solid state physics, materials science, surface science, etc. I am much indebted to the gererations of students who have passed through my laboratory, since they have stimulated me with elementary but essential questions in various phases of the studies. I am also grateful to T. Azuma, Y. Kido, K. Kimura, H. Naramoto, and S. Seki for critical reading of the manuscript. Tsukuba, August 2001 Hiroshi Kudo Contents Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 1o Terminology and Table of Symbols . . . . . . . . . . . . . . . . . . . . . . . 5 2. 2. 1 Notes on Terminology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 2. 2 Frequently Used Symbols . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 3. Binary Encounter Electron Emission . . . . . . . . . . . . . . . . . . . . . . 7 3. 1 Ion Electron Elastic Collisions . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 3. 2 Recoil Cross Section of Orbital Electrons . . . . . . . . . . . . . . . . . .

This book collects the papers presented at the NATO Advanced Research Workshop on "Ionization of Solids by Heavy Particles", held in Giardini-Naxos (Taormina), Italy, on June 1 -5, 1992. The meeting was the first to gather scientists to discuss the physics of electron emission and other ionization effects occurring during the interaction of heavy particles with condensed matter. The central problem in the field is how to use observations of electron emission and final radiation damage to understand what happens inside the solid, like excitation mechanisms, the propagation of the electronic excitation along different pathways, and surface effects. The ARW began with a brief survey of the field, stressing the unknowns. It was pointed out that ionization theories can only address the very particular case of weak perturbations. For this problem, this meant high speed, low-charged projectiles (a perturbation treatment of interactions with slow, highly charged ions was later presented). Only semi-empirical models exist for velocities lower than the Fermi velocity in the solid, which can be used to predict kinetic electron emission yields. These models, however, do not address the basic questions about the mechanisms for electron excitation, transport and escape through the surface layer.

In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.

The book describes the experimental techniques employed to study surfaces and interfaces. The emphasis is on the experimental method. Therefore all chapters start with an introduction of the scientific problem, the theory necessary to understand how the technique works and how to understand the results. Descriptions of real experimental setups, experimental results at different systems are given to show both the strength and the limits of the technique. In a final part the new developments and possible extensions of the techniques are presented. The included techniques provide microscopic as well as macroscopic information. They cover most of the techniques used in surface science.