Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.

This book presents an extensive review of the optical- and laser-based techniques that are available for quality control and process monitoring in the industrial production environment. The physical principles of each technique are explained in simple terms, and their applicability to specific industrial needs is discussed on the basis of wide hands-on experience. A large number of practical applications to in-process industrial sensing and metrology are described, and more than onethousand references are included. Topics include on-line surface inspection, 3-D imaging, nondestructive testing, fiber-optic sensors, robot guidance, as well as spectroscopic and light-scattering process analyzers. Key Features * Describes a large number of practical applications to in-process industrial sensing and metrology * Includes more than one thousand references * Covers on-line surface inspection, 3-D imaging, nondestructive testing, fiber-optic sensors, robot guidance, and more

Contents of this volume include: on-line glossmeter for stainless steel sheets; in process optical measurement of micro profile on cold rolled steel plates; optical profile transducer; and optical profilers for surface roughness.

Optical science and engineering affect almost every aspect of our lives. Millions of miles of optical fiber carry voice and data signals around the world. Lasers are used in surgery of the retina, kidneys, and heart. New high-efficiency light sources promise dramatic reductions in electricity consumption. Night-vision equipment and satellite surveillance are changing how wars are fought. Industry uses optical methods in everything from the production of computer chips to the construction of tunnels. Harnessing Light surveys this multitude of applications, as well as the status of the optics industry and of research and education in optics, and identifies actions that could enhance the field's contributions to society and facilitate its continued technical development.

"This book instructs inspectors and designers of optical elements and assemblies with the primary means of inspection and testing, as well as the relevant tools and instruments"--

Devoted to new optical measurement techniques in industry as well as the life sciences, this book has a fresh perspective on the development of modern optical sensors, which are essential for the control of parameters in industrial and biomedical applications.

The book offers a thorough introduction to machine vision. It is organized in two parts. The first part covers the image acquisition, which is the crucial component of most automated visual inspection systems. All important methods are described in great detail and are presented with a reasoned structure. The second part deals with the modeling and processing of image signals and pays particular regard to methods, which are relevant for automated visual inspection.