Micro-nanotechnologies (MNT) are already making a profound impact on our daily lives. New applications are well underway in the US, Asia, and Europe. However, their potentially disruptive nature, along with the public's concerns, has produced a number of challenges. Commercializing Micro-Nanotechnology Products provides a snapshot of the cur

This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications.

Micro process engineering is approaching both academia and industry. With the provision of micro devices and systems by commercial suppliers, one main barrier for using these units has been eliminated. More and more they become familiar, thereby being one facet of the upheaval in chemical industry. This book focuses on processes rather than on devices: what is 'before' and 'behind' micro device fabrication. A comprehensive and detailed overview is given on: - A multi-faceted, hierarchic analysis of chemical micro process technology - Modelling and simulation of micro reactors - Liquid- and liquid/liquid-phase reactions - Gas/liquid reactions - Gas-phase reactions (heterogeneous catalysis)

Micro-assembly is a key enabling technology for cost effective manufacture of new generations of complex micro products. It is also a critical technology for retaining mdustrial capabilities in high labour cost areas such as Europe since up to 80% of the production cost in some industries is attributed directly to assembly processes. With the continuous trend for product miniaturisation, the scientific and technologi cal developments in micro-assembly are expected to have a significant long-term economic, demographic and social impact. A distinctive feature of the process is that surface forces are often dominant over gravity forces, which determines a number of specific technical challenges. Critical areas which are currently being addressed include development of assembly systems with high positional accuracy, micro gripping methods that take into ac count the adhesive surface forces, high precision micro-feeding techniques and mi cro-joining processes. Micro-assembly has developed rapidly over the last few years and all the pre dictions are that it will remain a critical technology for high value products in a number of key sectors such as healthcare, communications, defence and aerospace. The key challenge is to match the significant technological developments with a new generation of micro products that will establish firmly micro-assembly as a core manufacturing process.

This second edition of Handbook of Micro/Nanotribology addresses the rapid evolution within this field, serving as a reference for the novice and the expert alike. Two parts divide this handbook: Part I covers basic studies, and Part II addresses design, construction, and applications to magnetic storage devices and MEMS. Discussions include: surface physics and methods for physically and chemically characterizing solid surfaces roughness characterization and static contact models using fractal analysis sliding at the interface and friction on an atomic scale scratching and wear as a result of sliding nanofabrication/nanomachining as well as nano/picoindentation lubricants for minimizing friction and wear surface forces and microrheology of thin liquid films measurement of nanomechanical properties of surfaces and thin films atomic-scale simulations of interfacial phenomena micro/nanotribology and micro/nanomechanics of magnetic storage devices This comprehensive book contains 16 chapters contributed by more than 20 international researchers. In each chapter, the presentation starts with macroconcepts and then lead to microconcepts. With more than 500 illustrations and 50 tables, Handbook of Micro/Nanotribology covers the range of relevant topics, including characterization of solid surfaces, measurement techniques and applications, and theoretical modeling of interfaces. What's New in the Second Edition? New chapters on: AFM instrumentation Surface forces and adhesion Design and construction of magnetic storage devices Microdynamical devices and systems Mechanical properties of materials in microstructure Micro/nanotribology and micro/nanomechanics of MEMS devices