This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The volume gathers twelve contributions presented at the 5th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Ilmenau, Germany in November 2020. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).

This book brings together investigations which combine theoretical and experimental results related to such systems as capsule micromechanisms, active micro catheters, nanotube vascular stents, mechanisms for micromilling, different compliant mechanisms including grippers and compliant systems with actuators and sensors, microrobots based on vibrations, tactile sensors, tooth brackets, compliant valves, and space reflectors. This volume contains twenty-two contributions from researchers from ten countries, represented at the 4th Conference on Microactuators and Micromechanisms, which was held in 2016 in Ilmenau, Germany. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. This Conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).

This book contains applications of micromechanisms and microactuators in several very modern technical fields such as mechatronics, biomechanics, machines, micromachines, robotics and apparatuses. In connection with its topic, the work combines the theoretical results with experimental tests on micromechanisms and microactuators. The book presents the most recent research advances in Machine and Mechanisms Science. It includes the accepted reviewed papers of researchers specialized in the topics of the conference: microactuators and micro-assembly, micro sensors involving movable solids, micro-opto-mechanical devices, mechanical tools for cell and tissue studies, micromanipulation and micro-stages, micro-scale flight and swimming, micro-robotics and surgical tools, micron-scale power generation, miniature manufacturing machines, micromechatronics and micro-mechanisms, biomechanics micro and nano scales and control issues in microsystems. The presented applications of micromechanisms and microactuators in many technical fields will interest industrial companies and encourage scientifical knowledge and cooperation between academia and industry.

This book presents a basic introduction to micromechanisms and microactuators, particularly to their basic configurations and design. This book fills the persisting gap in the published literature on the mechanical manipulative aspects of micromechanisms. It also helps in offering specialized introductory courses on micromechanisms and microactuators not as part of MEMS sensing devices, but as mechanical manipulative systems. The level of the book is suitable for use in both undergraduate and introductory graduate programmes. The book presents an overview of miniaturization and scaling laws, basic design principles of micro-sized mechanisms and actuators, micro-fabrication processes, and some futuristic issues. The volume contains a large number of figures and illustrations for easy understanding by the readers. It will also be useful to researchers and professionals looking for an introduction to the topic.

This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The volume gathers the contributions presented at the 6th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Hyderabad, India in December 2022. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).

This book contains selected papers presented at MAMM 2010, the First Workshop on Microactuators and Micromechanisms. This workshop has brought together scientists, industry experts and students and has provided a special opportunity for know-how exchange and collaboration in various disciplines referring to microsystems technology. The conference was organized by the Technical Committees of Mechanical Transmissions and Micromachines under the patronage of IFToMM, the International Federation for the Promotion of Mechanism and Machine Science.

In Optical Nano and Micro Actuator Technology, leading engineers, material scientists, chemists, physicists, laser scientists, and manufacturing specialists offer an in-depth, wide-ranging look at the fundamental and unique characteristics of light-driven optical actuators. They discuss how light can initiate physical movement and control a variety of mechanisms that perform mechanical work at the micro- and nanoscale. The book begins with the scientific background necessary for understanding light-driven systems, discussing the nature of light and the interaction between light and NEMS/MEMS devices. It then covers innovative optical actuator technologies that have been developed for many applications. The book examines photoresponsive materials that enable the design of optically driven structures and mechanisms and describes specific light-driven technologies that permit the manipulation of micro- and nanoscale objects. It also explores applications in optofluidics, bioMEMS and biophotonics, medical device design, and micromachine control. Inspiring the next generation of scientists and engineers to advance light-driven technologies, this book gives readers a solid grounding in this emerging interdisciplinary area. It thoroughly explains the scientific language and fundamental principles, provides a holistic view of optical nano and micro actuator systems, and illustrates current and potential applications of light-driven systems.