The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last decade. Most of the contributors have built devices or systems or developed processes or algorithms in these areas. The book is a unique collection of chapters from different areas with a common theme and is immensely useful to academic researchers and practitioners in the industry who work in this field.

Microsystems are systems that integrate, on a chip or a package, one or more of many different categories of microdevices. As the past few decades were dominated by the development and rapid miniaturization of circuitry, the current and coming decades are witnessing a similar revolution in the miniaturization of sensors, actuators, and electronics; and communication, control and power devices. Applications ranging from biomedicine to warfare are driving rapid innovation and growth in the field, which is pushing this topic into graduate and undergraduate curricula in electrical, mechanical, and biomedical engineering.

Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. - Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors - Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS - Presents the only book to discuss both smart sensors and MEMS for industrial applications

Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle. Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices. Features include: * Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods. * Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines. * Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin. * An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology. * Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field. Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.

Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.

This book provides an introduction to the complex field of ubiquitous computing Ubiquitous Computing (also commonly referred to as Pervasive Computing) describes the ways in which current technological models, based upon three base designs: smart (mobile, wireless, service) devices, smart environments (of embedded system devices) and smart interaction (between devices), relate to and support a computing vision for a greater range of computer devices, used in a greater range of (human, ICT and physical) environments and activities. The author details the rich potential of ubiquitous computing, the challenges involved in making it a reality, and the prerequisite technological infrastructure. Additionally, the book discusses the application and convergence of several current major and future computing trends. Key Features: Provides an introduction to the complex field of ubiquitous computing Describes how current technology models based upon six different technology form factors which have varying degrees of mobility wireless connectivity and service volatility: tabs, pads, boards, dust, skins and clay, enable the vision of ubiquitous computing Describes and explores how the three core designs (smart devices, environments and interaction) based upon current technology models can be applied to, and can evolve to, support a vision of ubiquitous computing and computing for the future Covers the principles of the following current technology models, including mobile wireless networks, service-oriented computing, human computer interaction, artificial intelligence, context-awareness, autonomous systems, micro-electromechanical systems, sensors, embedded controllers and robots Covers a range of interactions, between two or more UbiCom devices, between devices and people (HCI), between devices and the physical world. Includes an accompanying website with PowerPoint slides, problems and solutions, exercises, bibliography and further reading Graduate students in computer science, electrical engineering and telecommunications courses will find this a fascinating and useful introduction to the subject. It will also be of interest to ICT professionals, software and network developers and others interested in future trends and models of computing and interaction over the next decades.

Nanosensors for Smart Cities covers the fundamental design concepts and emerging applications of nanosensors for the creation of smart city infrastructures. Examples of major applications include logistics management, where nanosensors could be used in active transport tracking devices for smart tracking and tracing, and in agri-food productions, where nanosensors are used in nanochips for identity, and food inspection, and smart storage. This book is essential reading for researchers working in the field of advanced sensors technology, smart city technology and nanotechnology, and stakeholders involved in city management. Nanomaterials based sensors (nanosensors) can offer many advantages over their microcounterparts, including lower power consumption, high sensitivity, lower concentration of analytes, and smaller interaction distance between object and sensor. With the support of artificial intelligence (AI) tools, such as fuzzy logic, genetic algorithms, neural networks, and ambient-intelligence, sensor systems are becoming smarter. - Provides information on the fabrication and fundamental design concepts of nanosensors for intelligent systems - Explores how nanosensors are being used to better monitor and maintain infrastructure services, including street lighting, traffic management and pollution control - Assesses the challenges for creating nanomaterials-enhanced sensors for mass-market consumer products