Metal Impurities in Silicon-Device Fabrication
Title | Metal Impurities in Silicon-Device Fabrication PDF eBook |
Author | Klaus Graff |
Publisher | Springer Science & Business Media |
Pages | 285 |
Release | 2013-03-07 |
Genre | Technology & Engineering |
ISBN | 3642571212 |
This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. This new edition includes important recent data and many new tables.
Metal Impurities in Silicon- and Germanium-Based Technologies
Title | Metal Impurities in Silicon- and Germanium-Based Technologies PDF eBook |
Author | Cor Claeys |
Publisher | Springer |
Pages | 464 |
Release | 2018-08-13 |
Genre | Technology & Engineering |
ISBN | 3319939254 |
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
High Purity Silicon VI
Title | High Purity Silicon VI PDF eBook |
Author | Electrochemical Society. Meeting |
Publisher | The Electrochemical Society |
Pages | 720 |
Release | 2000 |
Genre | Science |
ISBN | 9781566772846 |
"... papers that were presented at the Sixth Symposium on High Purity Silicon held in Phoenix, Arizona at the 198th Meeting of the Electrochemical Society, October 22-27, 2000."--Preface.
High Purity Silicon
Title | High Purity Silicon PDF eBook |
Author | |
Publisher | |
Pages | 724 |
Release | 2000 |
Genre | Crystal growth |
ISBN |
Handbook of Photovoltaic Silicon
Title | Handbook of Photovoltaic Silicon PDF eBook |
Author | Deren Yang |
Publisher | Springer |
Pages | 0 |
Release | 2019-11-28 |
Genre | Technology & Engineering |
ISBN | 9783662564714 |
The utilization of sun light is one of the hottest topics in sustainable energy research. To efficiently convert sun power into a reliable energy – electricity – for consumption and storage, silicon and its derivatives have been widely studied and applied in solar cell systems. This handbook covers the photovoltaics of silicon materials and devices, providing a comprehensive summary of the state of the art of photovoltaic silicon sciences and technologies. This work is divided into various areas including but not limited to fundamental principles, design methodologies, wafering techniques/fabrications, characterizations, applications, current research trends and challenges. It offers the most updated and self-explanatory reference to all levels of students and acts as a quick reference to the experts from the fields of chemistry, material science, physics, chemical engineering, electrical engineering, solar energy, etc..
Crystal Growth and Evaluation of Silicon for VLSI and ULSI
Title | Crystal Growth and Evaluation of Silicon for VLSI and ULSI PDF eBook |
Author | Golla Eranna |
Publisher | CRC Press |
Pages | 432 |
Release | 2014-12-08 |
Genre | Science |
ISBN | 1040055850 |
Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemical
Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes 7
Title | Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes 7 PDF eBook |
Author | Dieter K. Schroder |
Publisher | The Electrochemical Society |
Pages | 406 |
Release | 2007 |
Genre | Semiconductors |
ISBN | 1566775698 |
Diagnostic characterization techniques for semiconductor materials, devices and device processing are addressed at this symposium. It will cover new techniques as well as advances in routine analytical technology applied to semiconductor process development and manufacture. The hardcover edition includes a CD-ROM of ECS Transactions, Volume 10, Issue 1, Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007). The PDF edition also includes the ALTECH 2007 papers.