MEMS Vibratory Gyroscopes

MEMS Vibratory Gyroscopes
Title MEMS Vibratory Gyroscopes PDF eBook
Author Cenk Acar
Publisher Springer Science & Business Media
Pages 262
Release 2008-12-16
Genre Technology & Engineering
ISBN 0387095365

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MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

Coriolis Vibratory Gyroscopes

Coriolis Vibratory Gyroscopes
Title Coriolis Vibratory Gyroscopes PDF eBook
Author Vladislav Apostolyuk
Publisher Springer
Pages 122
Release 2015-08-12
Genre Technology & Engineering
ISBN 3319221981

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This book provides the latest theoretical analysis and design methodologies of different types of Coriolis vibratory gyroscopes (CVG). Together, the chapters analyze different types of sensitive element designs and their kinematics, derivation of motion equations, analysis of sensitive elements dynamics in modulated and demodulated signals, calculation and optimization of main performance characteristics, and signal processing and control. Essential aspects of numerical simulation of CVG using Simulink® are also covered. This is an ideal book for graduate students, researchers, and engineers working in fields that require gyroscope application, including but not limited to: inertial sensors and systems, automotive and consumer electronics, small unmanned aircraft control systems, personal mobile navigation systems and related software development, and augmented and virtual reality systems.

Cylindrical Vibratory Gyroscope

Cylindrical Vibratory Gyroscope
Title Cylindrical Vibratory Gyroscope PDF eBook
Author Xuezhong Wu
Publisher Springer Nature
Pages 208
Release 2021-06-19
Genre Technology & Engineering
ISBN 9811627266

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This book introduces readers to the shell structure, operating principle, manufacturing process, and control theory for cylindrical vibratory gyroscopes. The cylindrical vibratory gyroscope is an important type of Coriolis vibratory gyroscope that holds considerable potential for development and application. The main aspects addressed include: operating principle and structure, theoretical analysis and modeling, dynamic analysis and modeling, manufacturing process, parameter testing methods, closed-loop control, and the error compensation mechanism in cylindrical vibratory gyroscopes.

MEMS Vibratory Gyroscopes

MEMS Vibratory Gyroscopes
Title MEMS Vibratory Gyroscopes PDF eBook
Author Cenk Acar
Publisher
Pages 256
Release 2008
Genre Gyroscopes
ISBN

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Whole-Angle MEMS Gyroscopes

Whole-Angle MEMS Gyroscopes
Title Whole-Angle MEMS Gyroscopes PDF eBook
Author Doruk Senkal
Publisher John Wiley & Sons
Pages 176
Release 2020-06-16
Genre Technology & Engineering
ISBN 1119441889

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Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.

Advanced Control Design of MEMS Vibratory Gyroscopes

Advanced Control Design of MEMS Vibratory Gyroscopes
Title Advanced Control Design of MEMS Vibratory Gyroscopes PDF eBook
Author Juntao Fei
Publisher
Pages 0
Release 2011-10
Genre Accelerometers
ISBN 9781614704874

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MEMS (Micro Electro Mechanical Systems) technologies were developed by applying semiconductor microfabrication technologies to make three-dimensional microstructures and mechanical systems. MEMS technologies offer the advantages of batch fabrication of numbers of devices as well as an ability to integrate multiple functional units in a small area, which is important for developing smart and sophisticated devices. Gyroscopes are commonly used sensors for measuring angular velocity in many areas of applications such as navigation, homing, and control stabilisation. Fabrication imperfections and thermal, mechanical noise may hinder the measurement of angular velocity of MEMS gyroscope. This book presents a comprehensive treatment of the analysis and advanced control design of MEMS gyroscope for the problem of angular velocity measurement and minimisation of the cross coupling between two axes.

Vibratory Gyroscopes Based on Micro-Electro-Mechanical and non-Micro-Electro-Mechanical Systems

Vibratory Gyroscopes Based on Micro-Electro-Mechanical and non-Micro-Electro-Mechanical Systems
Title Vibratory Gyroscopes Based on Micro-Electro-Mechanical and non-Micro-Electro-Mechanical Systems PDF eBook
Author Valeri V. Chikovani
Publisher Cambridge Scholars Publishing
Pages 363
Release 2023-12-15
Genre Technology & Engineering
ISBN 1527551091

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This book provides a unified approach for the two versions of Coriolis vibratory gyroscopes: Micro-Electro-Mechanical System (MEMS) and non-MEMS. It describes a new, differential mode of operation, analyzing the new triple mode gyro—rate, rate-integrating, and differential. The latter provides the gyro with an increased versatility by providing the maximum possible accuracy under changeable motion parameters and environmental conditions. The book also presents computer simulation, experiments, and test results on the rejection of external disturbances, and considers the fabrication processes of MEMS, metallic and quartz resonators. It will interest researchers, scientists, engineers, and students specializing in the field of inertial sensors, as well as engineers of digital control systems, and inertial sensors test-engineers. It can also be used as a reference book when designing vibratory gyros.