Macroscopic Properties of a Multipolar Electron Cyclotron Resonance Microwave-cavity Plasma Source for Anisotropic Silicon Etching
Title | Macroscopic Properties of a Multipolar Electron Cyclotron Resonance Microwave-cavity Plasma Source for Anisotropic Silicon Etching PDF eBook |
Author | Jeffrey Alan Hopwood |
Publisher | |
Pages | 538 |
Release | 1990 |
Genre | Cyclotron resonance |
ISBN |
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An Investigation of Anisotropic Etching of Silicon in an Electron Cyclotron Resonance Plasma
Title | An Investigation of Anisotropic Etching of Silicon in an Electron Cyclotron Resonance Plasma PDF eBook |
Author | Brian David Musson |
Publisher | |
Pages | 200 |
Release | 1991 |
Genre | Anisotropy |
ISBN |
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Experimental Development of Microwave Cavity Plasma Reactors for Large Area and High Rate Diamond Film Deposition
Title | Experimental Development of Microwave Cavity Plasma Reactors for Large Area and High Rate Diamond Film Deposition PDF eBook |
Author | Jie Zhang |
Publisher | |
Pages | 606 |
Release | 1993 |
Genre | Diamonds |
ISBN |
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The Electromagnetic Evaluation of a Compact ECR Microwave Plasma Source
Title | The Electromagnetic Evaluation of a Compact ECR Microwave Plasma Source PDF eBook |
Author | Mark Alan Perrin |
Publisher | |
Pages | 332 |
Release | 1996 |
Genre | Electromagnetic measurements |
ISBN |
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An Investigation of Methods of Evaluating Plasma Etch Damage on Silicon
Title | An Investigation of Methods of Evaluating Plasma Etch Damage on Silicon PDF eBook |
Author | Venkatesh P. Gopinath |
Publisher | |
Pages | 196 |
Release | 1991 |
Genre | Plasma etching |
ISBN |
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Anisotropic Selective Etching of Polysilicon in a Microwave Electron Cyclotron Resonance Plasma
Title | Anisotropic Selective Etching of Polysilicon in a Microwave Electron Cyclotron Resonance Plasma PDF eBook |
Author | Prashant K. Gadgil |
Publisher | |
Pages | 138 |
Release | 1991 |
Genre | |
ISBN |
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Design and Experimental Investigation of a Large Diameter Electron Cyclotron Resonant Plasma Source
Title | Design and Experimental Investigation of a Large Diameter Electron Cyclotron Resonant Plasma Source PDF eBook |
Author | Fan Cheung Sze |
Publisher | |
Pages | 574 |
Release | 1993 |
Genre | Cyclotron resonance |
ISBN |
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