Infrared Spectroscopic Ellipsometry
Title | Infrared Spectroscopic Ellipsometry PDF eBook |
Author | Arnulf Röseler |
Publisher | VCH |
Pages | 168 |
Release | 1990 |
Genre | Ellipsometry |
ISBN |
Infrared Ellipsometry on Semiconductor Layer Structures
Title | Infrared Ellipsometry on Semiconductor Layer Structures PDF eBook |
Author | Mathias Schubert |
Publisher | Springer Science & Business Media |
Pages | 216 |
Release | 2004-11-26 |
Genre | Science |
ISBN | 9783540232490 |
The study of semiconductor-layer structures using infrared ellipsometry is a rapidly growing field within optical spectroscopy. This book offers basic insights into the concepts of phonons, plasmons and polaritons, and the infrared dielectric function of semiconductors in layered structures. It describes how strain, composition, and the state of the atomic order within complex layer structures of multinary alloys can be determined from an infrared ellipsometry examination. Special emphasis is given to free-charge-carrier properties, and magneto-optical effects. A broad range of experimental examples are described, including multinary alloys of zincblende and wurtzite structure semiconductor materials, and future applications such as organic layer structures and highly correlated electron systems are proposed.
Spectroscopic Ellipsometry
Title | Spectroscopic Ellipsometry PDF eBook |
Author | Harland G. Tompkins |
Publisher | Momentum Press |
Pages | 138 |
Release | 2015-12-16 |
Genre | Technology & Engineering |
ISBN | 1606507281 |
Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from sub-nanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself.
Spectroscopic Ellipsometry
Title | Spectroscopic Ellipsometry PDF eBook |
Author | Hiroyuki Fujiwara |
Publisher | John Wiley & Sons |
Pages | 388 |
Release | 2007-09-27 |
Genre | Technology & Engineering |
ISBN | 9780470060186 |
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
Ellipsometry at the Nanoscale
Title | Ellipsometry at the Nanoscale PDF eBook |
Author | Maria Losurdo |
Publisher | Springer Science & Business Media |
Pages | 740 |
Release | 2013-03-12 |
Genre | Technology & Engineering |
ISBN | 3642339565 |
This book presents and introduces ellipsometry in nanoscience and nanotechnology making a bridge between the classical and nanoscale optical behaviour of materials. It delineates the role of the non-destructive and non-invasive optical diagnostics of ellipsometry in improving science and technology of nanomaterials and related processes by illustrating its exploitation, ranging from fundamental studies of the physics and chemistry of nanostructures to the ultimate goal of turnkey manufacturing control. This book is written for a broad readership: materials scientists, researchers, engineers, as well as students and nanotechnology operators who want to deepen their knowledge about both basics and applications of ellipsometry to nanoscale phenomena. It starts as a general introduction for people curious to enter the fields of ellipsometry and polarimetry applied to nanomaterials and progresses to articles by experts on specific fields that span from plasmonics, optics, to semiconductors and flexible electronics. The core belief reflected in this book is that ellipsometry applied at the nanoscale offers new ways of addressing many current needs. The book also explores forward-looking potential applications.
Introduction to Experimental Infrared Spectroscopy
Title | Introduction to Experimental Infrared Spectroscopy PDF eBook |
Author | Mitsuo Tasumi |
Publisher | John Wiley & Sons |
Pages | 403 |
Release | 2014-11-17 |
Genre | Science |
ISBN | 047066567X |
Infrared spectroscopy is generally understood to mean the science of spectra relating to infrared radiation, namely electromagnetic waves, in the wavelength region occurring intermediately between visible light and microwaves. Measurements of infrared spectra have been providing useful information, for a variety of scientific research and industrial studies, for over half a century; this is set to continue in the foreseeable future. Introduction to Experimental Infrared Spectroscopy is intended to be a handy guide for those who have no, or limited, experience in infrared spectroscopic measurements but are utilising infrared-related methods for their research or in practical applications. Written by leading researchers and experienced practitioners, this work consists of 22 chapters and presents the basic theory, methodology and practical measurement methods, including ATR, photoacoustic, IR imaging, NIR, 2D-COS, and VCD. The six Appendices will aid readers in understanding the concepts presented in the main text. Written in an easy-to-understand way this book is suitable for students, researchers and technicians working with infrared spectroscopy and related methods.
Ellipsometry of Functional Organic Surfaces and Films
Title | Ellipsometry of Functional Organic Surfaces and Films PDF eBook |
Author | Karsten Hinrichs |
Publisher | Springer Science & Business Media |
Pages | 369 |
Release | 2013-10-24 |
Genre | Science |
ISBN | 3642401287 |
Ellipsometry is the method of choice to determine the properties of surfaces and thin films. It provides comprehensive and sensitive characterization in contactless and non-invasive measurements. This book gives a state-of-the-art survey of ellipsometric investigations of organic films and surfaces, from laboratory to synchrotron applications, with a special focus on in-situ use in processing environments and at solid-liquid interfaces. In conjunction with the development of functional organic, meta- and hybrid materials for new optical, electronic, sensing and biotechnological devices and fabrication advances, the ellipsometric analysis of their optical and material properties has progressed rapidly in the recent years.