Gaseous Electronics Conference Radio-Frequency Reference Cell
Title | Gaseous Electronics Conference Radio-Frequency Reference Cell PDF eBook |
Author | James K. Olthoff |
Publisher | DIANE Publishing |
Pages | 181 |
Release | 1996 |
Genre | |
ISBN | 078812708X |
The GEC RF Reference Cell is a parallel plate, capacity-coupled, rf plasma reactor that, in principle, is suitable for studies of basic discharge phenomena, investigation of industrial-type plasmas, and theoretical modeling. This report contains 12 articles that review nearly all of the experiments and theoretical modeling efforts that have been performed over the last 5 years using GEC cells. Together, they serve as a "users' guide" to the operation and performance of the GEC cell.
The Gaseous Electronics Conference RF Reference Cell
Title | The Gaseous Electronics Conference RF Reference Cell PDF eBook |
Author | Gaseous Electronics Conference. 48, 1995, Berkeley, Calif.. |
Publisher | |
Pages | 194 |
Release | 1995 |
Genre | |
ISBN |
Special Issue
Title | Special Issue PDF eBook |
Author | |
Publisher | |
Pages | 194 |
Release | 1995 |
Genre | Electronics |
ISBN |
Journal of Research of the National Institute of Standards and Technology
Title | Journal of Research of the National Institute of Standards and Technology PDF eBook |
Author | |
Publisher | |
Pages | 476 |
Release | 1995 |
Genre | Measurement |
ISBN |
Publications of the National Institute of Standards and Technology ... Catalog
Title | Publications of the National Institute of Standards and Technology ... Catalog PDF eBook |
Author | National Institute of Standards and Technology (U.S.) |
Publisher | |
Pages | 1162 |
Release | 1994 |
Genre | |
ISBN |
Plasma Processing of Semiconductors
Title | Plasma Processing of Semiconductors PDF eBook |
Author | P.F. Williams |
Publisher | Springer Science & Business Media |
Pages | 610 |
Release | 2013-11-11 |
Genre | Technology & Engineering |
ISBN | 9401158843 |
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Annual Gaseous Electronics Conference
Title | Annual Gaseous Electronics Conference PDF eBook |
Author | |
Publisher | |
Pages | |
Release | 1973 |
Genre | |
ISBN |