Chemical-Mechanical-Polishing (CMP), first used as a planarization technology in the manufacture of multi-level metal interconnects for high-density Integrated Circuits (IC), is readily adapted as an enabling technology in MicroElectroMechanical Systems (MEMS) fabrication, particularly polysilicon surface micromachining. The authors have demonstrated that CMP enhances the design and manufacturability of MEMS devices by eliminating several photolithographic definition and film etch issues generated by severe topography. In addition, CMP planarization readily allows multi-level polysilicon structures comprised of 4- or more levels of polysilicon, eliminates design compromise generated by non-planar topography, and provides an avenue for integrating different process technologies. A recent investigation has also shown that CMP is a valuable tool for assuring acceptable optical flatness of micro-optical components such as micromirrors. Examples of these enhancements include: an extension of polysilicon surface-micromachining fabrication to a 5-level technology, a method of monolithic integration of electronics and MEMS, and optically flat micromirrors.

Publishes papers reporting on research and development in optical science and engineering and the practical applications of known optical science, engineering, and technology.

Organic Chemistry I For Dummies, 2nd Edition (9781119293378) was previously published as Organic Chemistry I For Dummies, 2nd Edition (9781118828076). While this version features a new Dummies cover and design, the content is the same as the prior release and should not be considered a new or updated product. The easy way to take the confusion out of organic chemistry Organic chemistry has a long-standing reputation as a difficult course. Organic Chemistry I For Dummies takes a simple approach to the topic, allowing you to grasp concepts at your own pace. This fun, easy-to-understand guide explains the basic principles of organic chemistry in simple terms, providing insight into the language of organic chemists, the major classes of compounds, and top trouble spots. You'll also get the nuts and bolts of tackling organic chemistry problems, from knowing where to start to spotting sneaky tricks that professors like to incorporate. Refreshed example equations New explanations and practical examples that reflect today's teaching methods Fully worked-out organic chemistry problems Baffled by benzines? Confused by carboxylic acids? Here's the help you need—in plain English!

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

'Karplus's tales of a turbulent graduate school experience at Caltech will inspire readers to muster fortitude when everything seems to be spinning out of control. Karplus balances rigorous scientific discussions with refreshing chapters expounding his passion for photography and gastronomy.'Nature Chemistry, May 2020Nobel Laureate Martin Karplus was eight when his family fled Nazi-occupied Austria via Switzerland and France for the United States. He would later credit his life as a refugee as a decisive influence on his world view and approach to science.Spinach on the Ceiling is an autobiographical telling of Karplus' life story, and how it led him to win the Nobel Prize in Chemistry in 2013. The book captures pivotal moments in Martin's life — from his escape to Switzerland in 1938 shortly after Hitler's entrance into Austria; to memorable moments like when his parents gave him a microscope which opened his eyes to the wonders of science; to his education in New England and California; and his eventual scientific career which took him to England, Illinois, Columbia, Strasbourg, and Harvard. It relates how Martin's optimistic outlook and belief in his vision made it possible for him to overcome setbacks in his life, and turn a subject of study his colleagues considered a waste of time into a central part of chemistry and structural biology. It is his hope to inspire and aid young readers, in particular, to have a successful trajectory in their own lives. Although research and teaching have been his primary focus, he has traveled the world photographing people and places with a Leica IIIC and has had numerous exhibitions of the photographs. He has also enjoyed a lifelong interest in cooking and worked in some of the best restaurants in France and Spain.