This thesis report presents the design and fabrication process of electrostatically actuated and inkjet printed MEMS switch. It introduces a novel design and fabrication process where it combines two different technologies - MEMS technology and inkjet printing technology. It should also to be noted that, for the first-time inkjet printing technology is introduced for the fabrication of a MEMS device. The physical structure of the switching system consists of an anchor, the cantilever beam, top electrode and bottom transmission lines. During the fabrication process, different printed layers are characterized with respect to terminal resistances, sheet resistances of the materials, critical thickness of each layer, conductivity etc. Finally, after DC analysis of the fully printed switch, 1.2V is found to be the minimum achievable pull-down voltage for the electrically actuated cantilever beam. The air gap between the top and bottom electrodes were in micron-scale during DC analysis. At the end of the thesis, the experimental data are compared with the theoretical data. It is found that, the experimental data is closely correlated with the theoretical assumption.

Microelectromechanical Systems (MEMS) stand poised for the next major breakthrough in the silicon revolution that began with the transistor in the 1960s and has revolutionized microelectronics. MEMS allow one to not only observe and process information of all types from small scale systems, but also to affect changes in systems and the environment at that scale. “RF MEMS Switches and Integrated Switching Circuits” builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on RF MEMS switches and micromachined switching circuits, and presents a unified framework of coverage. This volume includes, but is not limited to, RF MEMS approaches, developments from RF MEMS switches to RF switching circuits, and MEMS switch components in circuit systems. This book also: -Presents RF Switches and switching circuit MEMS devices in a unified framework covering all aspects of engineering innovation, design, modeling, fabrication, control and experimental implementation -Discusses RF switch devices in detail, with both system and component-level circuit integration using micro- and nano-fabrication techniques -Includes an emphasis on design innovation and experimental relevance rather than basic electromagnetic theory and device physics “RF MEMS Switches and Integrated Switching Circuits” is perfect for engineers, researchers and students working in the fields of MEMS, circuits and systems and RFs.

"This work presents a novel approach to modeling and control of an RF- MEMS switch. The model presented in this work is comprehensive and generic in nature such that it takes into account the effect of squeeze film damping, impact force and electrostatic force effects on the dynamic behavior of the switch during pull-in and release of its membrane. This model makes it adaptable to any similar switch regardless of the form and/or dimensions. Simulation results of the switch dynamics is validated against experimental data for an identical switch. Model response to electrostatic voltage shows very good agreement with experiments. The proposed model is then used to construct a feedback controller capable of improving response parameters of the membrane during operation. Due to micro-dimensions of the switch, real time displacement measurement of the membrane is not readily available. Therefore, the proposed controller utilizes measurement of switch capacitors current as a platform for real time estimates of the membrane position. Membrane Current measurement was not available for control purposes due to the lack of the fabricated RF MEMS switch. Consequently, approximate model for current-displacement relationship is constructed from numerical solution of the nonlinear model data and system identification techniques using Simulink."--Abstract.

MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.