Analysis of Thin Micro-electro-mechanical Systems

Analysis of Thin Micro-electro-mechanical Systems
Title Analysis of Thin Micro-electro-mechanical Systems PDF eBook
Author Srinivas Telukunta
Publisher
Pages 278
Release 2006
Genre
ISBN

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Advanced Computational Methods in Science and Engineering

Advanced Computational Methods in Science and Engineering
Title Advanced Computational Methods in Science and Engineering PDF eBook
Author Barry Koren
Publisher Springer Science & Business Media
Pages 501
Release 2010-04-29
Genre Mathematics
ISBN 3642033873

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The aim of the present book is to show, in a broad and yet deep way, the state of the art in computational science and engineering. Examples of topics addressed are: fast and accurate numerical algorithms, model-order reduction, grid computing, immersed-boundary methods, and specific computational methods for simulating a wide variety of challenging problems, problems such as: fluid-structure interaction, turbulent flames, bone-fracture healing, micro-electro-mechanical systems, failure of composite materials, storm surges, particulate flows, and so on. The main benefit offered to readers of the book is a well-balanced, up-to-date overview over the field of computational science and engineering, through in-depth articles by specialists from the separate disciplines.

Resonant MEMS

Resonant MEMS
Title Resonant MEMS PDF eBook
Author Oliver Brand
Publisher John Wiley & Sons
Pages 512
Release 2015-04-22
Genre Technology & Engineering
ISBN 352767635X

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Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Mechanics of Microsystems

Mechanics of Microsystems
Title Mechanics of Microsystems PDF eBook
Author Alberto Corigliano
Publisher John Wiley & Sons
Pages 332
Release 2018-04-02
Genre Technology & Engineering
ISBN 1119053838

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Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.

Modeling MEMS and NEMS

Modeling MEMS and NEMS
Title Modeling MEMS and NEMS PDF eBook
Author John A. Pelesko
Publisher CRC Press
Pages 382
Release 2002-11-25
Genre Mathematics
ISBN 1420035290

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Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model. Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization o

Proceedings of the Tenth International Symposium on Applied Electromagnetic and Mechanics

Proceedings of the Tenth International Symposium on Applied Electromagnetic and Mechanics
Title Proceedings of the Tenth International Symposium on Applied Electromagnetic and Mechanics PDF eBook
Author T. Takagi
Publisher IOS Press
Pages 480
Release 2003
Genre Electromagnetic fields
ISBN 9781586033279

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This publication covers topics in the area of applied electromagnetics and mechanics. Since starting in Japan in 1988, the ISEM has become a well-known international forum on applied electromagnetics.

Principles of Microelectromechanical Systems

Principles of Microelectromechanical Systems
Title Principles of Microelectromechanical Systems PDF eBook
Author Ki Bang Lee
Publisher John Wiley & Sons
Pages 552
Release 2011-03-21
Genre Technology & Engineering
ISBN 111810224X

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The building blocks of MEMS design through closed-form solutions Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts. The closed-form solutions allow the reader to easily understand the linear and nonlinear behaviors of MEMS and their design applications. Beginning with an overview of MEMS, the opening chapter also presents dimensional analysis that provides basic dimensionless parameters existing in large- and small-scale worlds. The book then explains microfabrication, which presents knowledge on the common fabrication process to design realistic MEMS. From there, coverage includes: Statics/force and moment acting on mechanical structures in static equilibrium Static behaviors of structures consisting of mechanical elements Dynamic responses of the mechanical structures by the solving of linear as well as nonlinear governing equations Fluid flow in MEMS and the evaluation of damping force acting on the moving structures Basic equations of electromagnetics that govern the electrical behavior of MEMS Combining the MEMS building blocks to form actuators and sensors for a specific purpose All chapters from first to last use a unified approach in which equations in previous chapters are used in the derivations of closed-form solutions in later chapters. This helps readers to easily understand the problems to be solved and the derived solutions. In addition, theoretical models for the elements and systems in the later chapters are provided, and solutions for the static and dynamic responses are obtained in closed-forms. This book is designed for senior or graduate students in electrical and mechanical engineering, researchers in MEMS, and engineers from industry. It is ideal for radio frequency/electronics/sensor specialists who, for design purposes, would like to forego numerical nonlinear mechanical simulations. The closed-form solution approach will also appeal to device designers interested in performing large-scale parametric analysis.