Chemical Vapor Deposition of Epitaxial Silicon-germanium-carbon Alloys Using Cyclopropane as a Carbon Source Gas
Title | Chemical Vapor Deposition of Epitaxial Silicon-germanium-carbon Alloys Using Cyclopropane as a Carbon Source Gas PDF eBook |
Author | James R. Dekker |
Publisher | |
Pages | 406 |
Release | 1998 |
Genre | |
ISBN |
Proceedings of the Thirteenth International Conference on Chemical Vapor Deposition
Title | Proceedings of the Thirteenth International Conference on Chemical Vapor Deposition PDF eBook |
Author | Theodore M. Besmann |
Publisher | The Electrochemical Society |
Pages | 922 |
Release | 1996 |
Genre | Science |
ISBN | 9781566771559 |
Chemical Vapor Deposition of Silicon-germanium-carbon Films
Title | Chemical Vapor Deposition of Silicon-germanium-carbon Films PDF eBook |
Author | Pankaj Neelkanth Joshi |
Publisher | |
Pages | 294 |
Release | 1998 |
Genre | Chemical vapor deposition |
ISBN |
Chemical Vapor Deposition of Epitaxial Silicon
Title | Chemical Vapor Deposition of Epitaxial Silicon PDF eBook |
Author | |
Publisher | |
Pages | |
Release | 1984 |
Genre | |
ISBN |
A single chamber continuous chemical vapor deposition (CVD) reactor is described for depositing continuously on flat substrates, for example, epitaxial layers of semiconductor materials. The single chamber reactor is formed into three separate zones by baffles or tubes carrying chemical source material and a carrier gas in one gas stream and hydrogen gas in the other stream without interaction while the wafers are heated to deposition temperature. Diffusion of the two gas streams on heated wafers effects the epitaxial deposition in the intermediate zone and the wafers are cooled in the final zone by coolant gases. A CVD reactor for batch processing is also described embodying the deposition principles of the continuous reactor.
Proceedings of the Symposium on Fundamental Gas-Phase and Surface Chemistry of Vapor-Phase Materials Synthesis
Title | Proceedings of the Symposium on Fundamental Gas-Phase and Surface Chemistry of Vapor-Phase Materials Synthesis PDF eBook |
Author | Mark Donald Allendorf |
Publisher | The Electrochemical Society |
Pages | 506 |
Release | 1999 |
Genre | Science |
ISBN | 9781566772174 |
Chemical Vapor Deposition
Title | Chemical Vapor Deposition PDF eBook |
Author | Electrochemical Society. High Temperature Materials Division |
Publisher | The Electrochemical Society |
Pages | 1686 |
Release | 1997 |
Genre | Science |
ISBN | 9781566771788 |
Fundamental Gas-phase and Surface Chemistry of Vapor-phase Deposition II and Process Control, Diagnostics and Modeling in Semiconductor Manufacturing IV
Title | Fundamental Gas-phase and Surface Chemistry of Vapor-phase Deposition II and Process Control, Diagnostics and Modeling in Semiconductor Manufacturing IV PDF eBook |
Author | Electrochemical Society. High Temperature Materials Division |
Publisher | The Electrochemical Society |
Pages | 526 |
Release | 2001 |
Genre | Science |
ISBN | 9781566773195 |