Atomic Layer Deposition of Metal Oxide Thin Films on Metallic Substrates
Title | Atomic Layer Deposition of Metal Oxide Thin Films on Metallic Substrates PDF eBook |
Author | Ali Foroughi Abari |
Publisher | |
Pages | |
Release | 2012 |
Genre | Chemical vapor deposition |
ISBN |
Atomic Layer Deposition of Metal Oxide Thin Films
Title | Atomic Layer Deposition of Metal Oxide Thin Films PDF eBook |
Author | Dennis Michael Hausmann |
Publisher | |
Pages | 350 |
Release | 2002 |
Genre | Thin film devices |
ISBN |
Atomic Layer Deposition of Metal Oxide and Nitride Thin Films [microform]
Title | Atomic Layer Deposition of Metal Oxide and Nitride Thin Films [microform] PDF eBook |
Author | Becker, Jill Svenja |
Publisher | Ann Arbor, Mich. : University Microfilms International |
Pages | 308 |
Release | 2002 |
Genre | Thin film devices |
ISBN |
Atomic Layer Deposition for Semiconductors
Title | Atomic Layer Deposition for Semiconductors PDF eBook |
Author | Cheol Seong Hwang |
Publisher | Springer Science & Business Media |
Pages | 266 |
Release | 2013-10-18 |
Genre | Science |
ISBN | 146148054X |
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Atomic Layer Deposition and Characterization of Metal Oxide Thin Films
Title | Atomic Layer Deposition and Characterization of Metal Oxide Thin Films PDF eBook |
Author | Ali Mahmoodinezhad |
Publisher | |
Pages | 0 |
Release | 2022 |
Genre | |
ISBN |
Atomic Layer Deposition
Title | Atomic Layer Deposition PDF eBook |
Author | Tommi Kääriäinen |
Publisher | John Wiley & Sons |
Pages | 274 |
Release | 2013-05-28 |
Genre | Technology & Engineering |
ISBN | 1118062779 |
Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.
Chemical Vapour Deposition
Title | Chemical Vapour Deposition PDF eBook |
Author | Anthony C. Jones |
Publisher | Royal Society of Chemistry |
Pages | 600 |
Release | 2009 |
Genre | Science |
ISBN | 0854044655 |
"The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspects of CVD processes. Basic concepts, such as the various types of CVD processes, the design of CVD reactors, reaction modelling and CVD precursor chemistry are covered in the first few"--Jacket