Atomic Layer Deposition of Metal Oxide Thin Films
Title | Atomic Layer Deposition of Metal Oxide Thin Films PDF eBook |
Author | Dennis Michael Hausmann |
Publisher | |
Pages | 350 |
Release | 2002 |
Genre | Thin film devices |
ISBN |
Atomic Layer Deposition of Metal Oxide and Nitride Thin Films [microform]
Title | Atomic Layer Deposition of Metal Oxide and Nitride Thin Films [microform] PDF eBook |
Author | Becker, Jill Svenja |
Publisher | Ann Arbor, Mich. : University Microfilms International |
Pages | 308 |
Release | 2002 |
Genre | Thin film devices |
ISBN |
Atomic Layer Deposition of Metal Oxide Thin Films on Metallic Substrates
Title | Atomic Layer Deposition of Metal Oxide Thin Films on Metallic Substrates PDF eBook |
Author | Ali Foroughi Abari |
Publisher | |
Pages | |
Release | 2012 |
Genre | Chemical vapor deposition |
ISBN |
Atomic Layer Deposition and Characterization of Metal Oxide Thin Films
Title | Atomic Layer Deposition and Characterization of Metal Oxide Thin Films PDF eBook |
Author | Ali Mahmoodinezhad |
Publisher | |
Pages | 0 |
Release | 2022 |
Genre | |
ISBN |
Thin Film Metal-Oxides
Title | Thin Film Metal-Oxides PDF eBook |
Author | Shriram Ramanathan |
Publisher | Springer Science & Business Media |
Pages | 344 |
Release | 2009-12-03 |
Genre | Technology & Engineering |
ISBN | 1441906649 |
Thin Film Metal-Oxides provides a representative account of the fundamental structure-property relations in oxide thin films. Functional properties of thin film oxides are discussed in the context of applications in emerging electronics and renewable energy technologies. Readers will find a detailed description of deposition and characterization of metal oxide thin films, theoretical treatment of select properties and their functional performance in solid state devices, from leading researchers. Scientists and engineers involved with oxide semiconductors, electronic materials and alternative energy will find Thin Film Metal-Oxides a useful reference.
Atomic Layer Deposition for Semiconductors
Title | Atomic Layer Deposition for Semiconductors PDF eBook |
Author | Cheol Seong Hwang |
Publisher | Springer Science & Business Media |
Pages | 266 |
Release | 2013-10-18 |
Genre | Science |
ISBN | 146148054X |
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Mechanistic Insight and Properties of Metal Oxide Thin Films Deposited Via Atomic Layer Deposition
Title | Mechanistic Insight and Properties of Metal Oxide Thin Films Deposited Via Atomic Layer Deposition PDF eBook |
Author | Benjamin Peek |
Publisher | |
Pages | |
Release | 2019 |
Genre | |
ISBN |