Atomic Layer Deposition of Metal Oxide and Nitride Thin Films [microform]
Title | Atomic Layer Deposition of Metal Oxide and Nitride Thin Films [microform] PDF eBook |
Author | Becker, Jill Svenja |
Publisher | Ann Arbor, Mich. : University Microfilms International |
Pages | 308 |
Release | 2002 |
Genre | Thin film devices |
ISBN |
Chemical Vapor Deposition and Atomic Layer Deposition of Metal Oxide and Nitride Thin Films
Title | Chemical Vapor Deposition and Atomic Layer Deposition of Metal Oxide and Nitride Thin Films PDF eBook |
Author | Jeffrey Thomas Barton |
Publisher | |
Pages | 276 |
Release | 2003 |
Genre | Chemical vapor deposition |
ISBN |
Atomic Layer Deposition of Metal Oxide Thin Films
Title | Atomic Layer Deposition of Metal Oxide Thin Films PDF eBook |
Author | Dennis Michael Hausmann |
Publisher | |
Pages | 350 |
Release | 2002 |
Genre | Thin film devices |
ISBN |
Atomic Layer Deposition
Title | Atomic Layer Deposition PDF eBook |
Author | Tommi Kääriäinen |
Publisher | John Wiley & Sons |
Pages | 274 |
Release | 2013-05-28 |
Genre | Technology & Engineering |
ISBN | 1118062779 |
Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.
Atomic Layer Deposition and Characterization of Metal Oxide Thin Films
Title | Atomic Layer Deposition and Characterization of Metal Oxide Thin Films PDF eBook |
Author | Ali Mahmoodinezhad |
Publisher | |
Pages | 0 |
Release | 2022 |
Genre | |
ISBN |
Atomic Layer Deposition of Metal Oxide Thin Films on Metallic Substrates
Title | Atomic Layer Deposition of Metal Oxide Thin Films on Metallic Substrates PDF eBook |
Author | Ali Foroughi Abari |
Publisher | |
Pages | |
Release | 2012 |
Genre | Chemical vapor deposition |
ISBN |
Atomic Layer Deposition of Metal and Transition Metal Nitride Thin Films and in Situ Mass Spectrometry Studies
Title | Atomic Layer Deposition of Metal and Transition Metal Nitride Thin Films and in Situ Mass Spectrometry Studies PDF eBook |
Author | Marika Juppo |
Publisher | |
Pages | 65 |
Release | 2001 |
Genre | |
ISBN | 9789521002212 |