Advances in Rapid Thermal and Integrated Processing

Advances in Rapid Thermal and Integrated Processing
Title Advances in Rapid Thermal and Integrated Processing PDF eBook
Author F. Roozeboom
Publisher Springer Science & Business Media
Pages 568
Release 2013-03-09
Genre Science
ISBN 9401587116

Download Advances in Rapid Thermal and Integrated Processing Book in PDF, Epub and Kindle

Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.

Advances in Rapid Thermal Processing

Advances in Rapid Thermal Processing
Title Advances in Rapid Thermal Processing PDF eBook
Author Fred Roozeboom
Publisher The Electrochemical Society
Pages 470
Release 1999
Genre Technology & Engineering
ISBN 9781566772327

Download Advances in Rapid Thermal Processing Book in PDF, Epub and Kindle

Rapid Thermal and Integrated Processing

Rapid Thermal and Integrated Processing
Title Rapid Thermal and Integrated Processing PDF eBook
Author
Publisher
Pages 534
Release 1991
Genre Rapid thermal processing
ISBN

Download Rapid Thermal and Integrated Processing Book in PDF, Epub and Kindle

Advances in Rapid Thermal and Integrated Processing

Advances in Rapid Thermal and Integrated Processing
Title Advances in Rapid Thermal and Integrated Processing PDF eBook
Author F. Roozeboom
Publisher
Pages 580
Release 2014-01-15
Genre
ISBN 9789401587129

Download Advances in Rapid Thermal and Integrated Processing Book in PDF, Epub and Kindle

Handbook of Semiconductor Manufacturing Technology

Handbook of Semiconductor Manufacturing Technology
Title Handbook of Semiconductor Manufacturing Technology PDF eBook
Author Yoshio Nishi
Publisher CRC Press
Pages 3276
Release 2017-12-19
Genre Technology & Engineering
ISBN 1351829823

Download Handbook of Semiconductor Manufacturing Technology Book in PDF, Epub and Kindle

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

Reference Data for Engineers

Reference Data for Engineers
Title Reference Data for Engineers PDF eBook
Author Mac E. Van Valkenburg
Publisher Newnes
Pages 1696
Release 2001-09-26
Genre Technology & Engineering
ISBN 9780750672917

Download Reference Data for Engineers Book in PDF, Epub and Kindle

This standard handbook for engineers covers the fundamentals, theory and applications of radio, electronics, computers, and communications equipment. It provides information on essential, need-to-know topics without heavy emphasis on complicated mathematics. It is a "must-have" for every engineer who requires electrical, electronics, and communications data. Featured in this updated version is coverage on intellectual property and patents, probability and design, antennas, power electronics, rectifiers, power supplies, and properties of materials. Useful information on units, constants and conversion factors, active filter design, antennas, integrated circuits, surface acoustic wave design, and digital signal processing is also included. This work also offers new knowledge in the fields of satellite technology, space communication, microwave science, telecommunication, global positioning systems, frequency data, and radar.

Recent Advances in Sliding Modes: From Control to Intelligent Mechatronics

Recent Advances in Sliding Modes: From Control to Intelligent Mechatronics
Title Recent Advances in Sliding Modes: From Control to Intelligent Mechatronics PDF eBook
Author Xinghuo Yu
Publisher Springer
Pages 460
Release 2015-04-10
Genre Technology & Engineering
ISBN 3319182900

Download Recent Advances in Sliding Modes: From Control to Intelligent Mechatronics Book in PDF, Epub and Kindle

This volume is dedicated to Professor Okyay Kaynak to commemorate his life time impactful research and scholarly achievements and outstanding services to profession. The 21 invited chapters have been written by leading researchers who, in the past, have had association with Professor Kaynak as either his students and associates or colleagues and collaborators. The focal theme of the volume is the Sliding Modes covering a broad scope of topics from theoretical investigations to their significant applications from Control to Intelligent Mechatronics.