Advances in Rapid Thermal and Integrated Processing
Title | Advances in Rapid Thermal and Integrated Processing PDF eBook |
Author | F. Roozeboom |
Publisher | Springer Science & Business Media |
Pages | 568 |
Release | 2013-03-09 |
Genre | Science |
ISBN | 9401587116 |
Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.
Advances in Rapid Thermal Processing
Title | Advances in Rapid Thermal Processing PDF eBook |
Author | Fred Roozeboom |
Publisher | The Electrochemical Society |
Pages | 470 |
Release | 1999 |
Genre | Technology & Engineering |
ISBN | 9781566772327 |
Rapid Thermal and Integrated Processing
Title | Rapid Thermal and Integrated Processing PDF eBook |
Author | |
Publisher | |
Pages | 534 |
Release | 1991 |
Genre | Rapid thermal processing |
ISBN |
Advances in Rapid Thermal and Integrated Processing
Title | Advances in Rapid Thermal and Integrated Processing PDF eBook |
Author | F. Roozeboom |
Publisher | |
Pages | 580 |
Release | 2014-01-15 |
Genre | |
ISBN | 9789401587129 |
Handbook of Semiconductor Manufacturing Technology
Title | Handbook of Semiconductor Manufacturing Technology PDF eBook |
Author | Yoshio Nishi |
Publisher | CRC Press |
Pages | 3276 |
Release | 2017-12-19 |
Genre | Technology & Engineering |
ISBN | 1351829823 |
Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.
Reference Data for Engineers
Title | Reference Data for Engineers PDF eBook |
Author | Mac E. Van Valkenburg |
Publisher | Newnes |
Pages | 1696 |
Release | 2001-09-26 |
Genre | Technology & Engineering |
ISBN | 9780750672917 |
This standard handbook for engineers covers the fundamentals, theory and applications of radio, electronics, computers, and communications equipment. It provides information on essential, need-to-know topics without heavy emphasis on complicated mathematics. It is a "must-have" for every engineer who requires electrical, electronics, and communications data. Featured in this updated version is coverage on intellectual property and patents, probability and design, antennas, power electronics, rectifiers, power supplies, and properties of materials. Useful information on units, constants and conversion factors, active filter design, antennas, integrated circuits, surface acoustic wave design, and digital signal processing is also included. This work also offers new knowledge in the fields of satellite technology, space communication, microwave science, telecommunication, global positioning systems, frequency data, and radar.
Recent Advances in Sliding Modes: From Control to Intelligent Mechatronics
Title | Recent Advances in Sliding Modes: From Control to Intelligent Mechatronics PDF eBook |
Author | Xinghuo Yu |
Publisher | Springer |
Pages | 460 |
Release | 2015-04-10 |
Genre | Technology & Engineering |
ISBN | 3319182900 |
This volume is dedicated to Professor Okyay Kaynak to commemorate his life time impactful research and scholarly achievements and outstanding services to profession. The 21 invited chapters have been written by leading researchers who, in the past, have had association with Professor Kaynak as either his students and associates or colleagues and collaborators. The focal theme of the volume is the Sliding Modes covering a broad scope of topics from theoretical investigations to their significant applications from Control to Intelligent Mechatronics.