Advanced Short-time Thermal Processing for Si-based CMOS Devices 2
Title | Advanced Short-time Thermal Processing for Si-based CMOS Devices 2 PDF eBook |
Author | Mehmet C. Öztürk |
Publisher | The Electrochemical Society |
Pages | 444 |
Release | 2004 |
Genre | Technology & Engineering |
ISBN | 9781566774062 |
Advanced Short-time Thermal Processing for Si-based CMOS Devices
Title | Advanced Short-time Thermal Processing for Si-based CMOS Devices PDF eBook |
Author | Fred Roozeboom |
Publisher | The Electrochemical Society |
Pages | 488 |
Release | 2003 |
Genre | Computers |
ISBN | 9781566773966 |
Advanced Gate Stack, Source/drain, and Channel Engineering for Si-based CMOS 2
Title | Advanced Gate Stack, Source/drain, and Channel Engineering for Si-based CMOS 2 PDF eBook |
Author | Fred Roozeboom |
Publisher | The Electrochemical Society |
Pages | 472 |
Release | 2006 |
Genre | Gate array circuits |
ISBN | 1566775027 |
These proceedings describe processing, materials, and equipment for CMOS front-end integration including gate stack, source/drain and channel engineering. Topics: strained Si/SiGe and Si/SiGe on insulator; high-mobility channels including III-V¿s, etc.; nanowires and carbon nanotubes; high-k dielectrics, metal and FUSI gate electrodes; doping/annealing for ultra-shallow junctions; low-resistivity contacts; advanced deposition (e.g. ALD, CVD, MBE), RTP, UV, plasma and laser-assisted processes.
Advanced Gate Stack, Source/drain and Channel Engineering for Si-based CMOS
Title | Advanced Gate Stack, Source/drain and Channel Engineering for Si-based CMOS PDF eBook |
Author | |
Publisher | |
Pages | 658 |
Release | 2005 |
Genre | Technology & Engineering |
ISBN |
Physics and Technology of High-k Gate Dielectrics II
Title | Physics and Technology of High-k Gate Dielectrics II PDF eBook |
Author | Samares Kar |
Publisher | The Electrochemical Society |
Pages | 512 |
Release | 2004 |
Genre | Science |
ISBN | 9781566774055 |
"This volume is the proceedings of The Second International Symposium on High Dielectric Constant Materials: Materials Science, Processing, Reliability, and Manufacturing Issues ... and was held during [the] 204th Meeting [of the Electrochemical Society] ..."--P. v.
Rapid Thermal and Other Short-time Processing Technologies II
Title | Rapid Thermal and Other Short-time Processing Technologies II PDF eBook |
Author | Dim-Lee Kwong |
Publisher | The Electrochemical Society |
Pages | 458 |
Release | 2001 |
Genre | Technology & Engineering |
ISBN | 9781566773157 |
"Electronics, Dielectric Science and Technology, and High Temperature Materials Divisions."
Rapid Thermal Processing for Future Semiconductor Devices
Title | Rapid Thermal Processing for Future Semiconductor Devices PDF eBook |
Author | H. Fukuda |
Publisher | Elsevier |
Pages | 161 |
Release | 2003-04-02 |
Genre | Science |
ISBN | 0080540260 |
This volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. This symposium is second conference followed the previous successful first International RTP conference held at Hokkaido in 1997. The RTP 2001 covered the latest developments in RTP and other short-time processing continuously aiming to point out the future direction in the Silicon ULSI devices and II-VI, III-V compound semiconductor devices.This book covers the following areas: advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe, hetero-structure, novel metallization, inter-connect, silicidation, low-k materials, thin dielectrics including gate dielectrics and high-k materials, thin film deposition including SiGe, SOI and SiC, process and device modelling, Laser-assisted crystallization and TFT device fabrication technologies, temperature monitoring and slip-free technologies.